I-Graphite Substrate Wafer Holder ye-PECVD

Isibambi seWafer se-Graphite Substrate se-PECVD Isithombe Esifakiwe

Incazelo emfushane:

I-VET Energy's Graphite Substrate Holder yakhelwe ukugcina ukuhleleka kwe-wafer nokuzinza kuyo yonke inqubo ye-PECVD, ivimbele ukungcola futhi inciphise ubungozi bokulimala. I-Graphite Wafer Holder inikeza inkundla evikelekile, elinganayo, eqinisekisa ukuthi ama-wafer avezwa ngokulinganayo ku-plasma ukuze abekwe ngendlela efanayo nekhwalithi ephezulu. Ngokusebenza kwayo okuphezulu kwe-thermal namandla angavamile, lo mbambi usiza ukuthuthukisa ukusebenza kahle kwenqubo yonke kanye nokusebenza komkhiqizo.

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Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-VET Energy Graphite Substrate Wafer Holder iyisiphathi esinembayo esidizayinelwe inqubo ye-PECVD (Plasma Enhanced Chemical Vapor Deposition). Lesi Sibambi Se-Graphite Substrate sekhwalithi ephezulu senziwe ngezinto ezicwebezelayo eziphakeme kakhulu, ezinokumelana nezinga lokushisa eliphakeme kakhulu, ukumelana nokugqwala, ukuzinza kwe-dimensional nezinye izici. Inganikeza inkundla yokweseka ezinzile yenqubo ye-PECVD futhi iqinisekise ukufana nokucaba kokumiswa kwefilimu.

Ithebula le-VET Energy PECVD lokusekela i-graphite wafer linezici ezilandelayo:

▪Ukuhlanzeka okuphezulu:okuqukethwe kokungcola okuphansi kakhulu, gwema ukungcoliswa kwefilimu, qinisekisa ikhwalithi yefilimu.

▪Ukuminyana okuphezulu:ukuminyana okuphezulu, amandla aphezulu emishini, angakwazi ukumelana nokushisa okuphezulu nokucindezela okuphezulu kwemvelo ye-PECVD.

▪Ukuzinza okuhle kwe-dimensional:ushintsho oluncane lwe-dimensional ekushiseni okuphezulu, okuqinisekisa ukuzinza kwenqubo.

▪I-thermal conductivity enhle kakhulu:dlulisa kahle ukushisa ukuze uvimbele ukushisisa kwe-wafer.

▪Ukumelana nokugqwala okuqinile:ingamelana nokuguguleka kwamagesi ahlukahlukene agqwalayo kanye ne-plasma.

▪Isevisi eyenziwe ngokwezifiso:amatafula okusekela ama-graphite anobukhulu obuhlukahlukene kanye nokuma kungenziwa ngokwezifiso ngokuya ngezidingo zamakhasimende.

Izinzuzo Zomkhiqizo

▪Thuthukisa ikhwalithi yefilimu:Qinisekisa ukufakwa kwefilimu efanayo futhi uthuthukise ikhwalithi yefilimu.

▪Nweba impilo yesisetshenziswa:Ukumelana nokugqwala okuhle kakhulu, kwandisa impilo yesevisi yemishini ye-PECVD.

▪Yehlisa izindleko zokukhiqiza:Amathreyi e-graphite asezingeni eliphezulu anganciphisa izinga le-scrap futhi anciphise izindleko zokukhiqiza.

Izinto zegraphite ezivela ku-SGL:

Ipharamitha ejwayelekile: R6510
Inkomba	Izinga lokuhlola	Inani	Iyunithi
Usayizi wokusanhlamvu omaphakathi	ISO 13320	10	μm
Ukuminyana ngobuningi	I-DIN IEC 60413/204	1.83	g/cm³
I-porosity evulekile	I-DIN66133	10	%
Usayizi wembotshana ophakathi	I-DIN66133	1.8	μm
Ukuvumeleka	I-DIN 51935	0.06	cm²/s
Ukuqina kwe-Rockwell HR5/100	I-DIN IEC60413/303	90	HR
Ukumelana nogesi okuqondile	I-DIN IEC 60413/402	13	μΩm
Amandla e-Flexural	I-DIN IEC 60413/501	60	I-MPa
Amandla acindezelayo	I-DIN 51910	130	I-MPa
I-modulus yentsha	I-DIN 51915	11.5×10³	I-MPa
Ukunwetshwa kokushisa (20-200 ℃)	I-DIN 51909	4.2X10^-6	K^-1
I-Thermal conductivity (20 ℃)	I-DIN 51908	105	Wm^-1K^-1

Yakhelwe ngokukhethekile ukukhiqizwa kwamaseli elanga asebenza kahle kakhulu, asekela ukucutshungulwa kwe-wafer yosayizi omkhulu we-G12. Idizayini yenkampani yenethiwekhi ethuthukisiwe inyusa kakhulu ukusebenza, inika amandla amanani esivuno aphezulu kanye nezindleko zokukhiqiza eziphansi.

Into	Uhlobo	Inombolo yenethiwekhi ye-wafer
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-156	156-13 grephite isikebhe	144
	156-19 grephite isikebhe	216
	156-21 grephite isikebhe	240
	156-23 graphite isikebhe	308
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-125	125-15 grephite isikebhe	196
	125-19 grephite isikebhe	252
	125-21 isikebhe se-grphite	280