I-Tantalum carbide coated susceptor ye-wafer

Tantalum carbide camera susceptor for wafer Featured Umfanekiso

Inkcazelo emfutshane:

I-Semicera yinkokeli kwitekhnoloji yokukhusela ubushushu obuphezulu kwaye siyaziqhenya ngokuzisa i-CVD Tantalum Carbide (TaC) iimveliso zokugquma ukubonelela ngokhuseleko oluthembekileyo lobushushu obuphezulu kwi-graphite substrates zakho.I-graphite yinto ebalaseleyo yokumelana nobushushu obuphezulu, kodwa iyathandeka kwi-oxidation kumaqondo aphezulu, angenakuthintelwa ngokupheleleyo nakwi-vacuum furnace.I-CVD yethu yeTantalum Carbide (TaC) yokugquma inokuthintela ngokufanelekileyo i-oxidation ye-graphite substrate ngelixa igcina ukusebenza kwayo okuphezulu kobushushu obuphezulu.I-TaC ikwayimathiriyeli engasebenziyo enokumelana neentshukumo ngeegesi ezinjengeargon kunye nehydrogen.Qhagamshelana ne-Semicera namhlanje ukuze ufunde ngakumbi malunga ne-Tantalum Carbide CVD coated EPI susceptors ukuqinisekisa uzinzo kunye nokuthembeka kwezicelo zakho zobushushu obuphezulu.

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Ukwaleka kwe-TaC luhlobo lwe-tantalum carbide (TaC) yokwambathisa elungiselelwe yitekhnoloji yokubeka umphunga womzimba, inezi mpawu zilandelayo:

1. Ubulukhuni obuphezulu: Ukuqina kwe-TaC yokwambathisa kuphezulu, ngokuqhelekileyo kunokufikelela kwi-2500-3000HV, yinto ebalaseleyo yokugquma.

2. Ukumelana nokunxiba: I-TaC yokwambathisa ayigugi kakhulu, enokuthi inciphise ngokufanelekileyo ukuguga kunye nokonakala kwamalungu oomatshini ngexesha lokusetyenziswa.

3. Ukumelana kakuhle nobushushu obuphezulu: I-TaC yokwambathisa inokugcina ukusebenza kwayo okugqwesileyo phantsi kwemekobume yobushushu obuphezulu.

4. Uzinzo olululo lweekhemikhali: I-TaC yokugquma inozinzo olululo lweekhemikhali kwaye inokumelana neentshukumo ezininzi zeekhemikhali, ezinjengeeasidi kunye neziseko.

Tantalum Carbide CVD Coating EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性 Iimpawu ezibonakalayo ze I-TaC ukutyabeka
密度/ Ubuninzi	14.3 (g/cm³)
ILogo Simahla Akukho mlinganiselo Ipapashwe ngu- 比辐射率 / Ukukhutshwa kwezinto ezithile	0.3
热膨胀系数 / Ukwandiswa kwe-Thermal coefficient	6.3 10^-6/K
努氏硬度/ Ukuqina (HK)	2000 HK
电阻 / Ukuchasa	1×10^-5 Ohm*cm
热稳定性 / Uzinzo lobushushu	<2500℃
石墨尺寸变化 / Ubungakanani bokutshintsha kwegrafu	-10 ~ -20um
涂层厚度 / Ubukhulu bokugquma	≥20um ixabiso eliqhelekileyo (35um±10um)

I-Ningbo VET Energy Technology Co., Ltd lishishini lobugcisa obuphezulu obugxile kwimveliso kunye nokuthengiswa kwezinto eziphezulu eziphezulu, izixhobo kunye nobuchwepheshe obugquma igraphite, i-silicon carbide, i-ceramics, unyango lomphezulu njalo njalo.Iimveliso zisetyenziswa ngokubanzi kwi-photovoltaic, semiconductor, amandla amatsha, isinyithi, njl.

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