ICP Etch Carrier

Inkcazelo emfutshane:


  • Indawo yemvelaphi:eTshayina
  • Ulwakhiwo lweCrystal:isigaba seFCCβ
  • Ubuninzi:3.21 g/cm;
  • Ukuqina :2500 Vickers;
  • Ubungakanani benkozo :2~10μm;
  • Ukucoceka kwemichiza :99.99995%;
  • Ubungakanani bobushushu:640J·kg-1·K-1;
  • Iqondo lobushushu elingaphantsi :2700℃;
  • Amandla eFelexural :415 Mpa (RT 4-Point);
  • Imodyuli eNtsha:430 GPA (4pt bend, 1300℃);
  • Ukwandiswa kweThermal (CTE):4.5 10-6K-1;
  • I-Thermal Conductivity:300(W/MK);
  • Iinkcukacha zeMveliso

    Iithegi zeMveliso

    Ingcaciso yeMveliso

    Inkampani yethu ibonelela ngeenkonzo zenkqubo yokugquma kwe-SiC ngendlela ye-CVD kumphezulu wegraphite, iikeramics kunye nezinye izinto, ukwenzela ukuba iigesi ezikhethekileyo ezinekhabhoni kunye nesilicon zisabela kubushushu obuphezulu ukuze zifumane ubunyulu obuphezulu beamolekyuli zeSiC, iimolekyuli ezifakwe kumphezulu wezinto ezigqunyiweyo, ukwenza umaleko okhuselayo we-SIC.

    Iimpawu eziphambili:

    1. Ukumelana nobushushu obuphezulu be-oxidation:

    Ukumelana ne-oxidation kusekuhle kakhulu xa ubushushu buphezulu ukuya kuma-1600 C.

    2. Ukucoceka okuphezulu : yenziwe yi-chemical vapor deposition phantsi kwemeko yokushisa kwe-chlorination ephezulu.

    3. Ukumelana nokhukuliseko: ubunzima obuphezulu, indawo edibeneyo, iincinci ezincinci.

    4. Ukumelana nokubola: i-asidi, i-alkali, ityuwa kunye nee-reagents eziphilayo.

    IiNgcaciso eziphambili ze-CVD-SIC Coating

    Iipropati zeSiC-CVD

    Ulwakhiwo lweCrystal FCC isigaba β
    Ukuxinana g/cm ³ 3.21
    Ukuqina Vickers ubulukhuni 2500
    Ubungakanani benkozo μm 2~10
    Ucoceko lweMichiza % 99.99995
    Ubushushu Umthamo J·kg-1 ·K-1 640
    Ubushushu bokunciphisa 2700
    Amandla eFelexural MPa (RT 4-point) 415
    Imodulus eselula I-Gpa (4pt bend, 1300℃) 430
    Ukwandiswa kweThermal (CTE) 10-6K-1 4.5
    I-Thermal conductivity (W/mK) 300

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