Vet-China produces Tantalum Carbide Coated Wafer Susceptor, which uses cutting-edge CVD coating technology and can perform well under extreme working conditions. Its Tantalum Carbide material combines wear resistance and corrosion resistance, making it an ideal choice for the semiconductor manufacturing industry.
In high temperature and corrosive environments, Tantalum Carbide Coated Wafer Susceptor exhibits excellent chemical inertness and thermal stability, and can effectively resist the erosion of various chemical media, ensuring long-term use under harsh conditions. This feature makes our guide rings have great application potential in semiconductor processing, chemical applications and other fields.
Choosing Vet-China's Tantalum Carbide Coated Wafer Susceptor can not only improve your production efficiency, but also extend the service life of the equipment. Our products are strictly quality controlled to ensure that each one meets the highest industry standards to meet the different needs of customers.
Through continuous technological innovation, Vet-China is committed to providing customers with reliable solutions and promoting industry progress. Our Tantalum Carbide Coating Wafer Susceptor is your trusted choice for high temperature and corrosive environments, helping your applications reach new heights.
TaC coating is a kind of tantalum carbide (TaC) coating prepared by physical vapor deposition technology, it has the following characteristics:
1. High hardness: TaC coating hardness is high, usually can reach 2500-3000HV, is an excellent hard coating.
2. Wear resistance: TaC coating is very wear-resistant, which can effectively reduce the wear and damage of mechanical parts during use.
3. Good high temperature resistance: TaC coating can also maintain its excellent performance under high temperature environment.
4. Good chemical stability: TaC coating has good chemical stability and can resist many chemical reactions, such as acids and bases.
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碳化钽涂层物理特性物理特性 Physical properties of TaC coating |
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密度 / Density |
14.3 (g/cm³) |
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比辐射率 / Specific emissivity |
0.3 |
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热膨胀系数 / Thermal expansion coefficient |
6.3 10-6/K |
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努氏硬度 / Hardness (HK) |
2000 HK |
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电阻 / Resistance |
1×10-5 Ohm*cm |
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热稳定性 / Thermal stability |
<2500℃ |
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石墨尺寸变化 / Graphite size changes |
-10~-20um |
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涂层厚度 / Coating thickness |
≥20um typical value (35um±10um) |
Ningbo VET Energy Technology Co., Ltd is a high-tech enterprise focusing on the production and sales of high-end advanced materials, the materials and technology covering graphite, silicon carbide, ceramics, surface treatment and so on. The products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..
Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.
Warmly welcome you to visit our factory, let's have further discussion!
