TaC coated graphite ring

Short Description:

With the introduction of 8-inch silicon carbide (SiC) wafers, the requirements for temperature stability in semiconductor processes have become increasingly stringent. Especially in epitaxial processes, temperatures can exceed 2000 degrees Celsius. However, traditional base materials, such as graphite coated with silicon carbide, cannot remain stable in high-temperature environments and often sublimate, which has an adverse effect on the epitaxial process. Fortunately, Semikera’s CvD tantalum carbide (TaC) products can effectively solve this problem. Our tantalum carbide (TaC) can withstand extreme temperatures up to 2300 degrees Celsius and provide longer service life. By contacting Semikera, you can learn more about our advanced solutions, including customized options for tantalum carbide coated cover plates. We are committed to providing excellent protection for your epitaxial process, ensuring temperature stability and long service life, thereby improving process efficiency, reducing costs, and helping you achieve greater success.