TaC coated graphite guide ring

Short Description:

In the continuous development of semiconductor processes, the emergence of 8-inch silicon carbide (SiC) wafers has made temperature requirements more stringent. However, traditional base materials cannot cope with the challenges under high temperatures and are prone to sublimation and damage the epitaxial process. To solve this problem, Semicera launched the CvD Tantalum Carbide (TaC) product line. Our Tantalum Carbide (TaC) can withstand extreme temperatures up to 2300 degrees Celsius and provide a longer service life. Welcome to contact Semicera to learn more about our advanced solutions, including customized options for Tantalum Carbide coated cover plates. We are committed to bringing breakthrough advances to your semiconductor process and ensuring efficient and stable production.