Lithupa tsa graphite tse entsoeng ka maiketsetso tse nang le matla a phahameng a maiketsetso, rod ea graphite e koahetsoeng ka sic

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Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Hangata e shebane le bareki, 'me ke sepheo sa rona sa ho qetela hore e se be feela mofani ea tšepahalang, ea ka tšeptjoang le ea tšepahalang, empa hape le molekane oa bareki ba rona bakeng sa Theko e Tlase ka Ho Fetisisa China 1200c Plasma Enhanced Chemical Vapor Deposition.PecvdVacuum Funace, Ho ithuta haholoanyane ka seo re ka u etsetsang sona, ikopanye le rona neng kapa neng. Re labalabela ho theha likamano tse ntle le tsa nako e telele tsa khoebo le uena.
Hangata e lebisitsoe tlhokomelong ea bareki, 'me ke sepheo sa rona sa ho qetela hore e se be feela mofani ea nang le botumo bo botle, ea ka tšeptjoang le ea tšepahalang, empa hape le molekane oa bareki ba rona.China Plasma e Matlafalitsoeng ke Moholi oa Mouoane oa Lik'hemik'hale, Pecvd, Thepa ea rona e tsoetseng pele, taolo e ntle ea boleng, lipatlisiso le bokhoni ba nts'etsopele li etsa hore theko ea rona e theohe. Theko eo re fanang ka eona e kanna ea se be tlase ho fetisisa, empa re netefatsa hore e na le tlholisano ka botlalo! Rea u amohela ho ikopanya le rona hang-hang bakeng sa likamano tsa nako e tlang tsa khoebo le katleho e kopaneng!

Tlhaloso ea Sehlahisoa

Lisebelisoa tsa carbon / carbon(eo ka mor'a moo e bitsoang "C / C kapa CFC") ke mofuta oa lintho tse entsoeng ka motsoako o thehiloeng holim'a carbon le ho matlafatsoa ke carbon fiber le lihlahisoa tsa eona (carbon fiber preform). E na le inertia ea carbon le matla a phahameng a carbon fiber. E na le thepa e ntle ea mochini, ho hanyetsa mocheso, ho hanyetsa kutu, ho fokotsa likhohlano le litšobotsi tsa motlakase le tsa motlakase.

CVD-SiCbarbotage na le litšobotsi tsa sebopeho junifomo, thepa diseke ee, phahameng mocheso ho hanyetsa, khanyetso oxidation, bohloeki phahameng, acid & alkali ho hanyetsa le reagent manyolo, le thepa e tsitsitseng 'meleng le lik'hemik'hale.

Ha ho bapisoa le lisebelisoa tse phahameng tsa graphite, graphite e qala ho oxidize ho 400C, e tla baka tahlehelo ea phofo ka lebaka la oxidation, e leng se bakang tšilafalo ea tikoloho ho lisebelisoa tsa peripheral le likamore tsa vacuum, le ho eketsa litšila tsa tikoloho e hloekileng.

Leha ho le joalo, ho roala ha SiC ho ka boloka botsitso ba 'mele le lik'hemik'hale ka likhato tse 1600, E sebelisoa haholo indastering ea sejoale-joale, haholo indastering ea semiconductor.

Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho roala SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li sebetsane le mocheso o phahameng ho fumana limolek'hule tsa SiC tse hloekileng, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, ho etsa lera la tšireletso la SIC. SIC e entsoeng e tlamahane ka thata ho setsi sa graphite, e fana ka lisebelisoa tse khethehileng tsa graphite, kahoo e etsa hore bokaholimo ba graphite bo kopane, bo se ke ba e-ba le Porosity, ho hanyetsa mocheso o phahameng, ho hanyetsa kutu le ho hanyetsa oxidation.

 SiC coating process on graphite surface MOCVD susceptors

Lintlha tse ka sehloohong:

1. Ho hanyetsa mocheso o phahameng oa oxidation:

khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.

2. Bohloeki bo phahameng: bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.

3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.

4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.

 

Lintlha tse ka sehloohong tsa CVD-SIC Coatings:

SiC-CVD

Botenya

(g/cc)

3.21

Matla a flexural

(Mpa)

470

Katoloso ea mocheso

(10-6/K)

4

Thermal conductivity

(W/mK)

300

Litšoantšo tse qaqileng

SiC coating process on graphite surface MOCVD susceptorsSiC coating process on graphite surface MOCVD susceptorsSiC coating process on graphite surface MOCVD susceptorsSiC coating process on graphite surface MOCVD susceptorsSiC coating process on graphite surface MOCVD susceptors

Lintlha tsa Khampani

111

Lisebelisoa tsa Feme

222

Sebaka sa polokelo

333

Setifikeiti

Setifikeiti22

 


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