Heater ea nako e telele ea SIC Coated Graphite bakeng sa MOCVD K465i, Graphite Heater bakeng sa epitaxy

Tlhaloso e Khutšoanyane:

Lik'hemik'hale Graphite

Molemo: Ho hanyetsa mocheso o phahameng

Kopo:MOCVD/Vacuum sebōpi/Hot Zone

Boima ba Bongata: 1.68-1.91g/cm3

Matla a Flexural: 30-46Mpa

Ho hanyetsa: 7-12μΩm

Re romelle lengolo-tsoibila Khoasolla joalo ka PDF

Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Bophelo bo boleleleSIC e koahetsoeng ka Graphite Heaterbakeng sa MOCVD K465i, Graphite Heater bakeng sa epitaxy,
heater ea graphite, Graphite Heater bakeng sa MOCVD, heater, SIC e koahetsoeng ka Graphite Heater,

MOCVD Substrate Heater, Lisebelisoa tsa ho futhumatsa bakeng sa MOCVD

Graphiteheater:
Theheater ea graphitelikarolo li sebelisoa seboping se phahameng sa mocheso se nang le mocheso o fihlileng ho likhato tse 2200 sebakeng sa vacuum le likhato tse 3000 sebakeng sa khase e nang le deoxidized le e kentsoeng.
Lintho tse ka sehloohong tsa graphiteheater:
1. ho tšoana ha mohaho oa ho futhumatsa.
2. conductivity e ntle ea motlakase le mojaro o phahameng oa motlakase.
3. ho hanyetsa kutu.
4. inoxidizability.
5. bohloeki bo phahameng ba lik'hemik'hale.
6. matla a phahameng a mechine.
Molemo ke matla a matla, boleng bo phahameng le tlhokomelo e tlaase.
Re ka hlahisa anti-oxidation le nako e telele ea bophelo ba graphite crucible, hlobo ea graphite le likarolo tsohle tsa heater ea graphite.
Lintlha tse ka sehloohong tsa heater ea graphite:

Tlhaloso ea Setsebi	VET-M3
Boima ba Bongata (g/cm3)	≥1.85
Litaba tsa Molora (PPM)	≤500
Bothata ba Lebopo	≥45
Khanyetso e Khethehileng (μ.Ω.m)	≤12
Flexural Strength (Mpa)	≥40
Compressive Strength (Mpa)	≥70
Max. Boholo ba Mabele (μm)	≤43
Coefficient of Thermal Katoloso Mm/°C	≤4.4 * 10-6

Mofuthu oa graphite bakeng sa sebōpi sa motlakase o na le thepa ea ho hanyetsa mocheso, ho hanyetsa oxidation, conductivity e ntle ea motlakase le matla a molemo a mochine. Re ka sebelisa mefuta e fapaneng ea heater ea graphite ho latela meralo ea bareki.