Lisebelisoa tse tsamaisoang hantle, basebetsi ba phaello ea litsebi, le lihlahisoa le litšebeletso tse ntle haholo ka mor'a thekiso; Hape re bile balekane ba ka sehloohong ba bonngoeng le bana, motho e mong le e mong o khomarela k'hamphani e rua molemo "kopano, boinehelo, mamello" bakeng sa Silicon Carbide ea boleng bo botle RBSIC/SISIC Cantilever Paddle E Sebelisitsoeng ho Indasteri ea Solar Photovoltaic, Re amohela ka tieo tse peli tse tsoang linaheng tse ling le tsa malapeng. balekane ba likhoebo, 'me re tšepa ho sebetsa le uena haufinyane!
Lisebelisoa tse tsamaisoang hantle, basebetsi ba phaello ea litsebi, le lihlahisoa le litšebeletso tse ntle haholo ka mor'a thekiso; Re bile balekane ba ka sehloohong ba bonngoeng le bana, motho e mong le e mong o khomarela k'hamphani e rua molemo "kopano, boinehelo, mamello" bakeng saChina Refractory ceramic le sebōpi sa ceramic, Ho fihlela litlhoko tsa bareki ba motho ka mong bakeng sa ts'ebeletso e 'ngoe le e' ngoe e phethahetseng le lintho tsa boleng bo tsitsitseng. Re amohela ka mofuthu bareki lefatšeng ka bophara ho re etela, ka tšebelisano-'moho ea rona e nang le likarolo tse ngata, 'me re kopane re ntshetsa pele limmaraka tse ncha, ho theha bokamoso bo khanyang!
SiC e koahetsoeng ka karoloana ea Graphite bakeng sa Semiconductor Li-susceptors li tšoara le li-wafers tsa semiconductor tse futhumatsang nakong ea ts'ebetso ea mocheso. Sesebelisoa se entsoe ka thepa e monyang matla ka induction, conduction, le/kapa radiation ebe e futhumatsa sephaphatha. Ho hanyetsa mocheso oa eona oa mocheso, mocheso oa mocheso, le bohloeki li bohlokoa bakeng sa ts'ebetso e potlakileng ea mocheso (RTP). Silicon carbide coated graphite, silicon carbide (SiC), le silicon (Si) hangata e sebelisoa bakeng sa li-susceptors ho latela tikoloho e khethehileng ea mocheso le lik'hemik'hale. PureSiC® CVD SiC le ClearCarbon™ ultra-pure material e fanang ka botsitso bo phahameng ba mocheso, ho hanyetsa kutu le ho tšoarella. Tlhaloso ea Sehlahisoa
SiC coating ea Graphite substrate bakeng sa lits'ebetso tsa Semiconductor e hlahisa karolo e nang le bohloeki bo phahameng le ho hanyetsa sepakapaka sa oxidizing.
CVD SiC kapa CVI SiC e sebelisoa ho Graphite ea likarolo tse bonolo kapa tse rarahaneng tsa moralo. Ho roala ho ka sebelisoa ka botenya bo sa tšoaneng le likarolong tse kholo haholo.
Li-ceramics tsa tekheniki ke khetho ea tlhaho bakeng sa lits'ebetso tsa ts'ebetso ea mocheso oa semiconductor ho kenyelletsa RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, le annealing. CoorsTek e fana ka lisebelisoa tse tsoetseng pele tse etselitsoeng ho mamella litšisinyeho tsa mocheso ka bohloeki bo phahameng, bo tiileng, bo pheta-phetoang bakeng sa mocheso o phahameng.
Likaroloana:
· Excellent Thermal Shock Resistance
· Ho Hanyetsa ho Tšoaroa ha 'Mele ho babatsehang
· Excellent Chemical Resistance
· Bohloeki bo Phahameng ka ho Fetisisa
· Ho fumaneha ka Sebopeho se Ratang
· E ka sebelisoa tlas'a Oxidizing Atmosphere
kopo:
Sephaphatha se hloka ho feta mehatong e mengata pele se se se loketse ho sebelisoa lisebelisoa tsa elektroniki. Mokhoa o mong oa bohlokoa ke silicon epitaxy, eo ho eona liphaphatha li tsamaisoang ka li-susceptors tsa graphite. Thepa le boleng ba li-susceptors li na le phello ea bohlokoa ho boleng ba epitaxial layer ea wafer.
Maemo a Tloaelehileng a Base Graphite Material:
Tekano e Hlahang: | 1.85 g/cm3 |
Ho hanyetsa Motlakase: | 11 μΩm |
Flexural Strenth: | 49 MPa (500kgf/cm2) |
Bothata ba Lebōpo: | 58 |
Molora: | <5ppm |
Thermal Conductivity: | 116 W/mK (100 kcal/mhr-℃) |
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