Lisebelisoa tse tsamaisoang hantle, basebetsi ba phaello ea litsebi, le lihlahisoa le litšebeletso tse ntle haholo ka mor'a thekiso; Hape re bile balekane ba ka sehloohong ba bonngoeng le bana, motho e mong le e mong o khomarela k'hamphani e rua molemo "kopano, boinehelo, mamello" bakeng sa Silicon Carbide ea boleng bo botle RBSIC/SISIC Cantilever Paddle E Sebelisitsoeng ho Indasteri ea Solar Photovoltaic, Re amohela ka tieo tse peli tse tsoang linaheng tse ling le tsa malapeng. bo-mphato ba likhoebo, 'me re tšepa ho sebetsa le uena haufinyane!
Lisebelisoa tse tsamaisoang hantle, basebetsi ba phaello ea litsebi, le lihlahisoa le litšebeletso tse ntle haholo ka mor'a thekiso; Hape re bile balekane ba ka sehloohong ba bonngoeng le bana, motho e mong le e mong o khomarela k'hamphani e rua molemo "kopano, boinehelo, mamello" bakeng saChina Refractory ceramic le sebōpi sa ceramic, Ho fihlela litlhoko tsa bareki ba motho ka mong bakeng sa ts'ebeletso e 'ngoe le e' ngoe e phethahetseng le lintho tse tsitsitseng tsa boleng. Re amohela ka mofuthu bareki lefatšeng ka bophara ho re etela, ka tšebelisano-'moho ea rona e nang le likarolo tse ngata, 'me re kopane re ntshetsa pele limmaraka tse ncha, ho theha bokamoso bo khanyang!
SiC e koahetsoeng ka karoloana ea Graphite bakeng sa Semiconductor Li-susceptors li tšoara le li-wafers tsa semiconductor tse futhumatsang nakong ea ts'ebetso ea mocheso. Sesebelisoa se entsoe ka thepa e monyang matla ka induction, conduction, le/kapa radiation ebe e futhumatsa sephaphatha. Ho hanyetsa mocheso oa eona oa mocheso, mocheso oa mocheso, le bohloeki li bohlokoa bakeng sa ts'ebetso e potlakileng ea mocheso (RTP). Silicon carbide coated graphite, silicon carbide (SiC), le silicon (Si) hangata e sebelisoa bakeng sa li-susceptors ho latela tikoloho e khethehileng ea mocheso le lik'hemik'hale. PureSiC® CVD SiC le ClearCarbon™ ultra-pure material e fanang ka botsitso bo phahameng ba mocheso, ho hanyetsa kutu, le ho tšoarella. Tlhaloso ea Sehlahisoa
SiC coating ea Graphite substrate bakeng sa lits'ebetso tsa Semiconductor e hlahisa karolo e nang le bohloeki bo phahameng le ho hanyetsa sepakapaka sa oxidizing.
CVD SiC kapa CVI SiC e sebelisoa ho Graphite ea likarolo tse bonolo kapa tse rarahaneng tsa moralo. Ho roala ho ka sebelisoa ka botenya bo sa tšoaneng le likarolong tse kholo haholo.
Li-ceramics tsa tekheniki ke khetho ea tlhaho bakeng sa lits'ebetso tsa ts'ebetso ea mocheso oa semiconductor ho kenyelletsa RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, le annealing. CoorsTek e fana ka lisebelisoa tse tsoetseng pele tse etselitsoeng ho mamella litšisinyeho tsa mocheso ka bohloeki bo phahameng, bo tiileng, bo pheta-phetoang bakeng sa mocheso o phahameng.
Likaroloana:
· Excellent Thermal Shock Resistance
· Ho Hanyetsa ho Tšoaroa ha 'Mele ho babatsehang
· Excellent Chemical Resistance
· Bohloeki bo Phahameng ka ho Fetisisa
· Ho fumaneha ka Sebopeho se Ratang
· E ka sebelisoa tlas'a Oxidizing Atmosphere
kopo:
Sephaphatha se hloka ho feta mehatong e mengata pele se se se loketse ho sebelisoa lisebelisoa tsa elektroniki. Mokhoa o mong oa bohlokoa ke silicon epitaxy, eo ho eona liphaphatha li tsamaisoang ka li-susceptors tsa graphite. Thepa le boleng ba li-susceptors li na le phello ea bohlokoa ho boleng ba epitaxial layer ea wafer.
Maemo a Tloaelehileng a Base Graphite Material:
Tekano e Hlahang: | 1.85 g/cm3 |
Ho hanyetsa Motlakase: | 11 μΩm |
Flexural Strenth: | 49 MPa (500kgf/cm2) |
Bothata ba Lebōpo: | 58 |
Molora: | <5ppm |
Thermal Conductivity: | 116 W/mK (100 kcal/mhr-℃) |
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