Hona joale re na le basebetsi ba sebetsang hantle haholo ho sebetsana le lipotso tse tsoang ho bareki. Sepheo sa rona ke "100% phethahatso ea bareki ka sehlahisoa kapa tšebeletso ea rona e ntle haholo, theko ea thekiso le tšebeletso ea basebetsi ba rona" 'me re natefeloe ke botumo bo botle har'a bareki. Ka lifeme tse ngata, re ka fana ka mefuta e mengata e fapaneng ea theko e tlase GaN-Basedepitaxial ho Sic Substrates 4′′, Re amohela ka mofuthu bo-mphato ba likhoebo tse nyane tse tsoang mekhoeng eohle ea bophelo, re ts'epa ho theha khoebo e nang le botsoalle le tšebelisano-mmoho ho ikopanya le uena le ho fihlella. sepheo sa ho hlola.
Hona joale re na le basebetsi ba sebetsang hantle haholo ho sebetsana le lipotso tse tsoang ho bareki. Sepheo sa rona ke "100% phethahatso ea bareki ka sehlahisoa kapa tšebeletso ea rona e ntle haholo, theko ea thekiso le tšebeletso ea basebetsi ba rona" 'me re natefeloe ke botumo bo botle har'a bareki. Ka lifeme tse ngata, re ka fana ka mefuta e mengata e fapaneng eaChina GaN Substrates le GaN Film, Re labalabela ka tieo ho sebelisana le bareki lefatšeng ka bophara. Re lumela hore re ka u khotsofatsa ka lihlahisoa tsa rona tsa boleng bo holimo le litšebeletso tse phethahetseng. Re boetse re amohela bareki ka mofuthu ho etela k'hamphani ea rona le ho reka lihlahisoa tsa rona.
SiC coating graphite MOCVD Wafer carriers
Li-susceptors tsa rona kaofela li entsoe ka graphite ea isostatic e matla haholo. Rua molemo ho tsoa bohloeki bo phahameng ba li-graphite tsa rona - tse ntlafalitsoeng haholo-holo bakeng sa lits'ebetso tse thata joalo ka epitaxy, ho hola ha kristale, ho kenngoa ha ion le plasma etching, hammoho le tlhahiso ea li-chips tsa LED.
Tlhaloso ea Sehlahisoa
SiC coating ea Graphite substrate bakeng sa lits'ebetso tsa Semiconductor e hlahisa karolo e nang le bohloeki bo phahameng le ho hanyetsa sepakapaka sa oxidizing.
CVD SiC kapa CVI SiC e sebelisoa ho Graphite ea likarolo tse bonolo kapa tse rarahaneng tsa moralo. Ho roala ho ka sebelisoa ka botenya bo sa tšoaneng le likarolong tse kholo haholo.
Kopanya
Melemo e khethehileng ea li-susceptors tsa graphite tse koahetsoeng ka SiC li kenyelletsa bohloeki bo phahameng haholo, ho roala homogenous le bophelo bo botle ba ts'ebeletso. Li boetse li na le khanyetso e phahameng ea lik'hemik'hale le thepa ea botsitso ba mocheso.
Re boloka mamello e haufi haholo ha re sebelisa seaparo sa SiC, re sebelisa machining a phahameng ka ho fetisisa ho etsa bonnete ba hore ho na le boemo bo tšoanang ba susceptor. Re boetse re hlahisa lisebelisoa tse nang le thepa e nepahetseng ea ho hanyetsa motlakase bakeng sa ho sebelisoa lits'ebetsong tse futhumatsang ka matla. Likarolo tsohle tse phethiloeng li tla le setifikeiti sa ho hloeka le ho lumellana ha dimensional.
Kopo:
Likaroloana:
· Excellent Thermal Shock Resistance
· Ho Hanyetsa ho Tšoaroa ha 'Mele ho babatsehang
· Excellent Chemical Resistance
· Bohloeki bo Phahameng ka ho Fetisisa
· Ho fumaneha ka Sebopeho se Ratang
· E ka sebelisoa tlas'a Oxidizing AtmosphereMaemo a Tloaelehileng a Base Graphite Material:
Tekano e Hlahang: | 1.85 g/cm3 |
Ho hanyetsa Motlakase: | 11 μΩm |
Flexural Strenth: | 49 MPa (500kgf/cm2) |
Bothata ba Lebōpo: | 58 |
Molora: | <5ppm |
Thermal Conductivity: | 116 W/mK (100 kcal/mhr-℃) |
Hona joale re na le basebetsi ba sebetsang hantle haholo ho sebetsana le lipotso tse tsoang ho bareki. Sepheo sa rona ke "100% phethahatso ea bareki ka sehlahisoa kapa tšebeletso ea rona e ntle haholo, theko ea thekiso le tšebeletso ea basebetsi ba rona" 'me re natefeloe ke botumo bo botle har'a bareki. Ka lifeme tse ngata, re ka fana ka mefuta e mengata e fapaneng ea theko e tlase GaN-Basedepitaxial ho Sic Substrates 4′′, Re amohela ka mofuthu bo-mphato ba likhoebo tse nyane tse tsoang mekhoeng eohle ea bophelo, re ts'epa ho theha khoebo e nang le botsoalle le tšebelisano-mmoho ho ikopanya le uena le ho fihlella. sepheo sa ho hlola.
Theko e theoleloangChina GaN Substrates le GaN Film, Re labalabela ka tieo ho sebelisana le bareki lefatšeng ka bophara. Re lumela hore re ka u khotsofatsa ka lihlahisoa tsa rona tsa boleng bo holimo le litšebeletso tse phethahetseng. Re boetse re amohela bareki ka mofuthu ho etela k'hamphani ea rona le ho reka lihlahisoa tsa rona.