The origin of the name epitaxial wafer
First, let’s popularize a small concept: wafer preparation includes two major links: substrate preparation and epitaxial process. The substrate is a wafer m...
Detailed analysis of heating principle of graphite rod
Graphite rod is often used as the electric heater of high-temperature vacuum furnace. It is easy to oxidize at high temperature. Except...
Photolithography technology mainly focuses on using optical systems to expose circuit patterns on silicon wafers. The accuracy of this process directly affects the performance and yield of integrat...
Sputtering targets are mainly used in the electronics and information industries, such as integrated circuits, information storage, liquid crystal displays, laser memories, electronic control devic...
Chemical Vapor Deposition (CVD) is an important thin film deposition technology, often used to prepare various functional films and thin-layer materials, and is widely used in semiconductor manufac...
2 Experimental results and discussion
2.1 Epitaxial layer thickness and uniformity
Epitaxial layer thickness, doping concentration and uniformity are one of the core indicators for judging the...