Wax soo saarka qalabka semiconductor inta badan waxaa ka mid ah qalabyada kala duwan, wareegyada isku dhafan iyo hababka baakadaha.
Wax-soo-saarka Semiconductor waxaa loo qaybin karaa saddex marxaladood: wax-soo-saarka alaabta jirka, badeecadawaferwax soo saarka iyo ururinta qalabka. Waxaa ka mid ah, wasakhowga ugu daran waa marxaladda wax soo saarka waferka alaabta.
Wasakhowga waxaa inta badan loo qaybiyaa biyaha wasakhda ah, gaaska wasakhda ah iyo qashinka adag.
Habka wax soo saarka Chip:
Wafer silikoon ahshiidi dibadda ka dib - nadiifinta - oksidation - iska caabin labiska - photolithography - horumarinta - etching - faafin, implantation ion - kaydinta uumiga kiimikaad - kiimikaad polishing farsamo - metallization, iwm.
Biyaha wasakhda ah
Xaddi badan oo biyo wasakh ah ayaa laga soo saaraa tallaabo kasta oo ah wax-soo-saarka semiconductor-ka iyo tijaabinta baakadaha, badiba biyaha wasakhda ah ee saldhigga-ashitada ah, biyaha wasakhda ah ee ammonia-ku-jira iyo biyaha wasakhda dabiiciga ah.
1. Biyaha wasakhda ah ee fluorine ku jira:
Hydrofluoric acid waxay noqotaa dareeraha ugu muhiimsan ee loo isticmaalo hababka oksaydhka iyo etching sababtoo ah sifooyinka oxidizing iyo daxalka. Biyaha wasakhda ah ee fluorine ku jira ee geeddi-socodku waxay inta badan ka yimaadaan habka fidinta iyo habka farsamaynta kiimikada ee habka wax soo saarka chip. Nidaamka nadiifinta ee waferrada silikoon iyo maacuunta la xidhiidha, hydrochloric acid ayaa sidoo kale la isticmaalaa marar badan. Dhammaan geeddi-socodyadan waxaa lagu dhammeeyaa haamo gaar ah ama qalab nadiifin ah, markaa biyaha wasakhda ah ee fluorine-ku ku jiro si madax-bannaan ayaa loo sii dayn karaa. Marka loo eego fiirsashada, waxaa loo qaybin karaa biyo-qashin-saar badan oo fluorine-ku-jira iyo biyo-qashin-yar oo ammonia-ku-jira. Guud ahaan, fiirsashada biyaha wasakhda ah ee ammonia-ku-koobnaanta sare leh waxay gaari kartaa 100-1200 mg/L. Shirkadaha intooda badani waxay dib u warshadeeyaan qaybtan biyaha wasakhda ah ee hababka aan u baahnayn tayada biyaha sare.
2. Biyaha wasakhda ah ee aysiidhka ku salaysan:
Ku dhawaad nidaam kasta oo ka mid ah habka wax soo saarka wareegga isku dhafan wuxuu u baahan yahay in chip-ka la nadiifiyo. Waqtigan xaadirka ah, sulfuric acid iyo hydrogen peroxide waa dareeraha nadiifinta ee ugu badan ee loo isticmaalo habka wax soo saarka wareegga isku dhafan. Isla mar ahaantaana, reagents-ka-saldhigga aashitada sida nitric acid, hydrochloric acid iyo biyaha ammonia ayaa sidoo kale la isticmaalaa.
Biyaha wasakhda ah ee saldhigga-ashitada ee habka wax-soo-saarka ayaa inta badan ka yimaada habka nadiifinta ee habka wax-soo-saarka chip. Habka baakadaha, chip-ka waxaa lagu daaweeyaa xal acid-saldhig inta lagu jiro falanqeynta korantada iyo kiimikada. Daawaynta ka dib, waxay u baahan tahay in lagu dhaqo biyo saafi ah si loo soo saaro biyaha wasakhda ah ee lagu dhaqo aashitada. Intaa waxaa dheer, reagents-saldhig-acid sida sodium hydroxide iyo hydrochloric acid ayaa sidoo kale loo isticmaalaa saldhigga biyaha saafiga ah si ay dib ugu soo nooleeyaan anion iyo resins cation si loo soo saaro dib-u-soo-kabashada biyaha wasakhda ah ee saldhigga ah. Dhaqidda biyaha dabada ayaa sidoo kale la soo saaraa inta lagu jiro habka gaaska qashinka ah ee saldhigga ah. Shirkadaha wax soo saarka wareegga isku dhafan, qadarka biyaha wasakhda ah ee saldhigga aashitada ayaa si gaar ah u weyn.
3. Biyaha wasakhda ah ee dabiiciga ah:
Sababtoo ah hababka wax soo saarka ee kala duwan, qadarka dareeraha organic ee loo isticmaalo warshadaha semiconductor waa mid aad u kala duwan. Si kastaba ha ahaatee, sida wakiilada nadiifinta, dareerayaasha organic ayaa wali si ballaaran loogu isticmaalaa xirmooyinka kala duwan ee baakadaha wax soo saarka. Walxaha qaarkood waxay noqdaan dareeraha biyaha wasakhda ah.
4. Biyaha kale ee wasakhda ah:
Habka wax-soo-saarka semiconductor-ku wuxuu isticmaali doonaa xaddi badan oo ammonia, fluorine iyo biyo saafi ah si loo nadiifiyo, taas oo soo saari doonta dheecaanka wasakhda ah ee ammonia-ku-koobnaanta sare leh.
Habka korantada ayaa looga baahan yahay habka baakadaha semiconductor. Chipku wuxuu u baahan yahay in la nadiifiyo ka dib koronto, iyo nadiifinta korantada nadiifinta biyaha wasakhda ah ayaa la soo saari doonaa habkan. Maadaama biraha qaarkood loo isticmaalo koronto-samaynta, waxaa jiri doona qiiqa ion birta ee nadiifinta biyaha wasakhda ah, sida rasaasta, daasadda, saxanka, zinc, aluminium, iwm.
Gaaska qashinka
Maadaama habka semiconductor uu leeyahay shuruudo aad u sarreeya oo loogu talagalay nadaafadda qolka qalliinka, marawaxadaha waxaa badanaa loo isticmaalaa in lagu soo saaro noocyo kala duwan oo gaasaska qashinka ah oo kacsan inta lagu jiro habka. Sidaa darteed, qiiqa gaaska qashinka ee warshadaha semiconductor waxaa lagu gartaa mugga qiiqa weyn iyo feejignaanta qiiqa yar. Gaaska wasakhda sii daaya sidoo kale inta badan waa isbedelaa.
Gaaska wasakhda ah ee sii daaya waxa loo qaybin karaa afar qaybood: gaaska acidic, gaaska alkaline, gaaska qashinka organic iyo gaaska sunta ah.
1. Gaaska qashinka ee Aashitada-saldhigga:
Gaaska qashinka ah ee sal-ku-dhiggu wuxuu inta badan ka yimaadaa fidinta,CVD, CMP iyo geeddi-socodka etching, kuwaas oo isticmaala xal nadiifinta aashitada-saldhigga si loo nadiifiyo maraqa.
Waqtigan xaadirka ah, dareeraha nadiifinta inta badan loo isticmaalo habka wax soo saarka semiconductor waa isku dhafka hydrogen peroxide iyo sulfuric acid.
Gaaska qashinka ah ee ka dhasha hababkan waxaa ka mid ah gaasaska acidic sida sulfuric acid, hydrofluoric acid, hydrochloric acid, nitric acid iyo phosphoric acid, gaaska alkaline-ka ayaa u badan ammonia.
2. Gaaska qashinka dabiiciga ah:
Gaaska qashinka dabiiciga ah wuxuu inta badan ka yimaadaa hababka sida sawir-qaadista, kobcinta, xoqidda iyo faafinta. Nidaamyadan, xalalka dabiiciga ah (sida isopropyl khamriga) ayaa loo isticmaalaa in lagu nadiifiyo dusha sare ee wafer, iyo gaaska qashinka ah ee ka yimaada isbeddelku waa mid ka mid ah ilaha gaasta qashinka dabiiciga ah;
Isla mar ahaantaana, sawir-qaadaha (photoresist) ee loo isticmaalo geeddi-socodka sawir-qaadista iyo etching waxay ka kooban yihiin dareerayaasha organic-ga ah, sida butyl acetate, taas oo u beddesha jawiga inta lagu jiro habka farsamaynta wafer, taas oo ah ilo kale oo gaaska qashinka ah.
3. Gaaska qashinka sunta ah:
Gaaska wasakhda sunta ah wuxuu inta badan ka yimaadaa hababka sida crystal epitaxy, etching etching iyo CVD. In geeddi-socodkan, noocyo kala duwan oo saafi ah oo gaar ah oo saafi ah ayaa loo isticmaalaa si loo farsameeyo maraqa, sida silicon (SiHj), fosfooraska (PH3), carbon tetrachloride (CFJ), borane, boron trioxide, iwm Qaar ka mid ah gaasaska gaarka ah waa sun. xiiqsan oo daxalaysa.
Isla mar ahaantaana, geeddi-socodka qallalan ee etching iyo nadiifinta ka dib markii uumiga kiimikada ee wax soo saarka semiconductor, qadar badan oo ah gaaska buuxa (PFCS) ayaa loo baahan yahay, sida NFS, C2F & CR, C3FS, CHF3, SF6, iwm. waxay leeyihiin nuugista xooggan ee gobolka iftiinka infrared waxayna ku jiraan jawiga waqti dheer. Guud ahaan waxaa loo tixgeliyaa inay yihiin isha ugu weyn ee saameynta aqalka dhirta lagu koriyo ee caalamiga ah.
4. Habka baakaynta gaaska qashinka:
Marka la barbar dhigo habka wax soo saarka semiconductor, gaaska wasakhda ah ee ay dhaliso habka baakadaha semiconductor waa mid fudud, gaar ahaan gaasta acidic, resin epoxy iyo boodhka.
Gaaska wasakhda acidic ayaa inta badan laga soo saaraa hababka sida koronto-samaynta;
Gaaska qashinka ee dubista waxaa lagu sameeyaa habka dubista ka dib marka badeecada la dhajiyo oo la xiro;
Mashiinka wax lagu gooyo wuxuu soo saaraa gaas wasakh ah oo ay ku jiraan boodh silikoon raad ah inta lagu jiro habka goynta waferka.
Dhibaatooyinka wasakhowga deegaanka
Dhibaatooyinka wasakhowga deegaanka ee warshadaha semiconductor, dhibaatooyinka ugu waaweyn ee loo baahan yahay in la xalliyo waa:
Sii daynta baaxadda weyn ee wasakhowga hawada iyo xeryahooda organic kacsan (VOCs) ee habka sawir-qaadista;
Sii daynta xeryahooda perfluorinated (PFCS) ee etching plasma iyo hababka kaydinta uumiga kiimikada;
Isticmaalka baaxadda weyn ee tamarta iyo biyaha ee wax soo saarka iyo ilaalinta badbaadada shaqaalaha;
Dib u warshadaynta iyo la socodka wasakhaynta alaabta;
Dhibaatooyinka isticmaalka kiimikooyinka halista ah ee hababka baakadaha.
Wax soo saar nadiif ah
Qalabka Semiconductor-ka tignoolajiyada wax soo saarka nadiifka ah ayaa laga wanaajin karaa dhinacyada alaabta ceeriin, hababka iyo xakamaynta habka.
Hagaajinta alaabta ceeriin iyo tamarta
Marka hore, nadiifinta alaabada waa in si adag loo xakameeyaa si loo yareeyo soo bandhigida wasakhda iyo walxaha.
Marka labaad, heerkulka kala duwan, ogaanshaha qulqulka, gariir, shoog koronto oo sarreeya iyo tijaabooyin kale waa in lagu sameeyaa qaybaha soo socda ama alaabada dhammaatay ka hor inta aan la gelin wax soo saarka.
Intaa waxaa dheer, nadiifinta alaabta caawimada ah waa in si adag loo xakameeyo. Waxaa jira teknoolojiyad badan oo loo isticmaali karo wax soo saarka nadiifka ah ee tamarta.
Hagaajinta habka wax soo saarka
Warshadaha semiconductor laftoodu waxay ku dadaalaan inay yareeyaan saamaynta ay ku leeyihiin deegaanka iyada oo loo marayo hagaajinta tignoolajiyada.
Tusaale ahaan, sannadihii 1970-aadkii, dareerayaasha organic waxaa inta badan loo isticmaali jiray in lagu nadiifiyo maraqyada farsamada nadiifinta wareegga isku dhafan. Sannadihii 1980-aadkii, xalalka aashitada iyo alkali sida sulfuric acid ayaa loo isticmaalay in lagu nadiifiyo maraqa. Ilaa 1990-meeyadii, tignoolajiyada nadiifinta oksijiinta ee balaasmaha ayaa la sameeyay.
Xagga baakadaha, inta badan shirkadaha hadda waxay adeegsadaan tignoolajiyada elektiroonigga ah, taasoo sababi doonta wasakhaynta birta culus ee deegaanka.
Si kastaba ha ahaatee, dhirta baakadaha ee Shanghai mar dambe ma isticmaalaan farsamada elektiroonigga ah, sidaas darteed ma jiraan wax saameyn ah oo biraha culus ay ku leeyihiin deegaanka. Waxaa la ogaan karaa in warshadaha semiconductor ay si tartiib tartiib ah u yareynayaan saameynta ay ku leedahay deegaanka iyada oo loo marayo hagaajinta habka iyo beddelka kiimikada ee habka horumarinta ee u gaarka ah, taas oo sidoo kale la socota isbeddelka horumarinta caalamiga ah ee hadda jira ee habka u doodista iyo naqshadeynta alaabta ku salaysan deegaanka.
Waqtigan xaadirka ah, horumaro badan oo geedi socodka maxalliga ah ayaa la sameynayaa, oo ay ku jiraan:
Beddelka iyo dhimista dhammaan gaaska PFCS-ammonium-ka, sida isticmaalka gaaska PFC-yada leh saamaynta aqalka dhirta lagu koriyo ee hooseeya si loogu beddelo gaaska saamaynta aqalka dhirta lagu koriyo oo sarreeya, sida hagaajinta socodka socodka iyo dhimista qaddarka gaaska PFCS ee loo isticmaalo geeddi-socodka;
Hagaajinta nadiifinta waferka badan ee nadiifinta hal-wafer si loo yareeyo cadadka walxaha nadiifinta kiimikada ee loo isticmaalo habka nadiifinta.
Xakamaynta habka adag:
a. Xaqiiji in farsamaynta habka wax-soo-saarka, kaas oo xaqiijin kara hab-samaynta saxda ah iyo wax-soo-saarka dufcadaha, oo yarayn kara heerka khaladka sare ee hawlgalka gacanta;
b. Qodobbada deegaanka ee habka aadka u nadiifka ah, qiyaastii 5% ama ka yar khasaaraha wax-soo-saarka waxaa sababa dadka iyo deegaanka. Qodobbada deegaanka ee habka aadka u nadiifka ah inta badan waxaa ka mid ah nadaafadda hawada, biyo nadiif ah oo sarreeya, hawo ciriiri ah, CO2, N2, heerkulka, qoyaanka, iwm. Heerka nadaafadda ee aqoon-is-weydaarsiga nadiifka ah waxaa badanaa lagu qiyaasaa tirada ugu badan ee qaybaha loo oggol yahay halbeeg kasta hawada, taas oo ah, xoojinta tirada qaybaha;
c. Xooji ogaanshaha, oo dooro qodobada muhiimka ah ee ku haboon ee lagu ogaanayo goobaha shaqada ee leh qashin badan inta lagu jiro habka wax soo saarka.
Ku soo dhawoow macaamiil kasta oo adduunka oo dhan ka yimid si ay noogu soo booqdaan dood dheeraad ah!
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Waqtiga boostada: Agoosto-13-2024