Kaydinta Uumiga Kiimikada (CVD) waa tignoolajiyada kaydinta filimka khafiifka ah ee muhiimka ah, oo inta badan loo isticmaalo diyaarinta filimo shaqeynaya oo kala duwan iyo agab khafiif ah, waxaana si weyn loogu isticmaalaa wax soo saarka semiconductor iyo qaybaha kale.
1. Mabda'a shaqada ee CVD
Habka CVD-ga, horudhac gaas ah (hal ama in ka badan oo gaas hore ah) ayaa lala xiriiriyaa dusha sare ee substrate waxaana lagu kululeeyaa heerkul gaar ah si ay u keento fal-celin kiimikaad iyo dhigaal dusha sare ee substrate si loo sameeyo filimka la rabo ama dahaarka. lakabka. Wax soo saarka fal-celinta kiimikaad waa mid adag, badiyaa isku-dhafka walxaha la rabo. Haddii aan rabno inaan silikoon ku dhejino dusha, waxaan isticmaali karnaa trichlorosilane (SiHCl3) sida gaaska hore: SiHCl3 → Si + Cl2 + HCl Silicon waxay ku xidhi doontaa dusha sare ee bannaan (labadaba gudaha iyo dibaddaba), halka gaaska chlorine iyo hydrochloric acid ay in laga saaro qolka.
2. Kala saaridda CVD
CVD kulaylka: Adigoo kululaynaya gaaska horudhaca ah si uu u qudhmo una dhigo dusha sare ee substrate-ka. Plasma Enhanced CVD (PECVD): Plasma waxaa lagu daraa CVD kulaylka si kor loogu qaado heerka falcelinta loona xakameeyo habka dhigista. Birta Organic CVD (MOCVD): Isticmaalka xeryahooda organic biraha sida gaasas horudhac ah, filimada khafiifka ah ee biraha iyo semiconductors waa la diyaarin karaa, waxaana inta badan loo isticmaalaa soo saarida qalabka sida LEDs.
3. Codsiga
(1) Wax-soo-saarka Semiconductor
Filimka silicide: waxaa loo isticmaalaa in lagu diyaariyo lakabyo dahaarka, substrates, lakabyo go'doomin, iwm. Filimka Nitride: waxaa loo isticmaalaa in lagu diyaariyo nitride silicon, aluminium nitride, iwm lakabyo iwm.
(2) Tignoolajiyada soo bandhigida
Filim ITO: Filimka oksaydh-qaade ee hufan, oo inta badan lagu isticmaalo bandhigyada gole fidsan iyo shaashadaha taabashada. Filimka naxaasta ah: waxaa loo isticmaalaa in lagu diyaariyo lakabyada baakadaha, khadadka wax-qabadka, iwm, si loo hagaajiyo waxqabadka qalabka bandhigga.
(3) Beeraha kale
Dahaarka indhaha: oo ay ku jiraan daahan ka-hortagga, filtarrada indhaha, iwm
4. Astaamaha habka CVD
Isticmaal jawi heerkul sare ah si aad kor ugu qaaddo xawaaraha falcelinta. Caadi ahaan waxaa lagu sameeyaa deegaan faaruq ah. Wasakhowga dusha sare ee qaybta waa in laga saaraa ka hor rinjiyeynta. Nidaamku wuxuu yeelan karaa xaddidaadyada substrates ee la dahaaran karo, tusaale ahaan xaddidnaanta heerkulka ama xaddidnaanta falcelinta. Dahaarka CVD wuxuu dabooli doonaa dhammaan aagagga qaybta, oo ay ku jiraan dunta, godadka indha la'aanta iyo dusha gudaha. Waxa laga yaabaa inay xaddiddo awoodda lagu qariyo meelaha gaarka ah ee la beegsanayo. Dhumucdiisuna waxay ku xaddidan tahay habka iyo xaaladaha alaabta. adhesion sare.
5. Faa'iidooyinka farsamada CVD
Midaysan: Awood u leh in uu gaadho meel dhigista labbiska ah ee dulsaarrada aagga ballaadhan.
Xakamaynta: Heerka dhigaalka iyo sifooyinka filimka waxaa lagu hagaajin karaa iyada oo la xakameynayo heerka socodka iyo heerkulka gaasta hore.
Kala duwanaansho: Ku habboon meel dhigista agabyada kala duwan, sida biraha, semiconductors, oxides, iwm.
Waqtiga boostada: May-06-2024