Silicon carbide (SiC) waa walxo cusub oo semiconductor ah. Silikon carbide waxa uu leeyahay farqi weyn oo band ah (qiyaastii 3 jeer silikon), xoog goobta muhiimka ah (qiyaastii 10 jeer silicon), conductivity kaamerada sare (qiyaastii 3 jeer silikon). Waa qalab semiconductor-ka soo socda oo muhiim ah. Dahaarka SiC waxaa si weyn loogu isticmaalaa warshadaha semiconductor iyo photovoltaics qoraxda. Gaar ahaan, dabaylaha loo isticmaalo kobaca epitaxial ee LEDs iyo Si single crystal epitaxy waxay u baahan yihiin isticmaalka daahan SiC. Sababo la xiriira kor u kaca xooggan ee LED-yada ee warshadaha iftiinka iyo soo bandhigida, iyo horumarka xooggan ee warshadaha semiconductor,Alaabta dahaarka SiCrajadu aad bay u wanaagsan tahay.
GOBOLKA CODSIGA
Daahirnimada, Qaabdhismeedka SEM, falanqaynta dhumucdaDahaarka SiC
Nadiifinta dahaarka SiC ee graphite iyadoo la isticmaalayo CVD waa sida ugu sareysa 99.9995%. Qaab dhismeedkiisu waa fcc. Filimada SiC-da ee ku dahaaran garaafyada ayaa ah (111) ku jihaysan sida lagu muujiyay xogta XRD (Jaantus.1) oo muujinaya tayadeeda sare ee crystalline. Dhumucda filimka SiC aad buu u lebbisan yahay sida ku cad sawirka 2.
Jaantuska 2: lebbiska dhumucda filimada SiC SEM iyo XRD ee filimka beta-SiC ee garaafka
Xogta SEM ee filimka khafiifka ah ee CVD SiC, cabbirka crystal waa 2 ~ 1 Opm
Qaab dhismeedka crystal ee filimka CVD SiC waa qaab dhismeed cubic waji ah, iyo jihada koritaanka filimku wuxuu ku dhow yahay 100%
Silikon carbide (SiC) oo dahaarka lehsalku waa saldhigga ugu fiican ee silikon crystal-ka ah iyo GaN epitaxy, kaas oo ah qaybta xudunta u ah foornada epitaxy. Saldhiggu waa qalab wax soo saar oo muhiim ah oo loogu talagalay silicon monocrystalline ee wareegyada isku dhafan ee waaweyn. Waxay leedahay nadiif sare, iska caabin heerkul sarreeya, caabbinta daxalka, cidhiidhiga hawada wanaagsan iyo sifooyin kale oo aad u fiican.
Codsiga alaabta iyo isticmaalka
Dahaarka saldhigga Graphite ee kobaca epitaxial silicon silikoon oo ku habboon mashiinnada Aixtron, iwm Dhumucdiisuna waxay tahay: 90 ~ 150um Dhexroorka godka wafer waa 55mm.
Waqtiga boostada: Mar-14-2022