Nadiifinta Sare ee Caadiga ah ee SiC Dahaarka leh ee Heater Heater Heat Element

Nadiifinta Sare ee Gaarka ah ee SiC Dahaarka Garaafiga Kuleyliyaha Cunsurka Sifada leh Sawirka

Sharaxaad Gaaban:

Kuleyliyaha garaafka waa nooc ka mid ah walxo kuleyliyaha korantada kaasoo dhaliya kuleyl iyadoo kuleyleysa walxo garaaf ahaan koronto ahaan, badiyaa laga sameeyay garaafka iyo ceramics. Qaab dhismeedkeeda mawjadaha ayaa si wax ku ool ah u baabi'in kara kulaylka waxaana si weyn loogu isticmaalaa warshadaha, dhismaha, beeraha iyo nolol maalmeedka. Sababtoo ah kuleylkeeda kulaylka wanaagsan iyo xasilloonida heerkulka sare, walxaha kuleyliyaha graphite ayaa si weyn loogu isticmaalaa warshadaha.

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Faahfaahinta Alaabta

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Tilmaamaha ugu muhiimsan ee kuleyliyaha garaafka:

1. isku mid ahaanshaha qaab dhismeedka kuleylka.

2. koronto wanaagsan iyo culeys koronto oo sarreeya.

3. iska caabin daxalka.

4. oksidizability.

5. nadiifinta kiimikada sare.

6. xoogga farsamada sare.

Faa'iidada waa tamar hufan, qiimo sare iyo dayactir hooseeya. Waxaan soo saari karnaa ka-hortagga oksaydhka iyo cimriga dheer ee garaafiga crucible, caaryada garaafka iyo dhammaan qaybaha kuleyliyaha garaafka.

Qiyaasaha ugu muhiimsan ee kuleyliyaha garaafka

Tilmaamaha Farsamada	Semicera-M3
Cufnaanta Weyn (g/cm3)	≥1.85
Waxyaabaha Ash (PPM)	≤500
Xeebta Adag	≥45
Iska caabin gaar ah (μ.Ω.m)	≤12
Xoog Jilicsan (Mpa)	≥40
Xoog isku dhejisan (Mpa)	≥70
Max. Cabbirka hadhuudhka (μm)	≤43
Isku-dhafka Balaadhinta kulaylka Mm/°C	≤4.4*10-6

VET Energy waa ahsoo saaraha dhabta ah ee alaabta graphite iyo silikoon carbide oo leh daahan CVD,keeni karakala duwanqaybo gaar ah oo loogu talagalay semiconductor iyo warshadaha sawirkavoltaic. Okooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista gudaha ee ugu sarreeya, waxay ku siin karaan xalal qalab xirfadeed oo dheeraad ahadiga.

Waxaan si joogto ah u horumarinaa habab horumarsan si aan u bixinno agab aad u horumarsan,iyowaxay ka shaqeeyeen tignoolajiyada gaarka ah ee rukhsadda leh, taas oo ka dhigi karta isku xidhka dahaarka iyo substrate-ka mid adag oo u nugul goynta.

FCunista alaabtayada:

1. Iska caabbinta oksaydhka heerkulka sare ilaa 1700℃.
2. daahir sare iyolebbiska kulaylka
3. iska caabin daxalka heer sare ah: acid, alkali, cusbo iyo reagents organic.
4. Adag sare, oogada is haysta, qaybo yaryar.
5. Cimri dheer oo adeeg iyo waarta

CVD SiC薄膜基本物理性能 Tilmaamaha asaasiga ah ee CVD SiCdaahan
性质 / Hanti	典型数值 / Qiimaha caadiga ah
晶体结构 / Dhismaha Crystal	FCC β wejiga多晶，主要为（111) 取向
密度 / Cufnaanta	3.21 g/cm³
硬度 / Adag	2500 维氏硬度（500g oo culeys ah
晶粒大小 / Hadhuudhka Size	2 ~ 10μm
纯度 / Nadiifnimada Kiimikada	99.99995%
热容 / Awoodda kulaylka	640 · kg^-1·K^-1
升华温度 / Heerkulka Sublimation	2700 ℃
抗弯强度 / Xoog Jilicsan	415 MPa RT 4-dhibic
杨氏模量 /Dhallinyarada Modulus	430 Gpa 4pt laab, 1300 ℃
导热系数 / ThermalHab-dhaqanka	300W·m^-1·K^-1
热膨胀系数 / Balaadhinta kulaylka (CTE)	4.5×10^-6K^-1