Epitaxial Epi Graphite Foosto Susceptor

Epitaxial Epi Graphite Foosto Susceptor

Epitaxial Epi Graphite Foosto Susceptorwaa qalab si gaar ah loo habeeyay iyo qalab kulaylinta loo isticmaalo in lagu hayo laguna kululeeyo substrate-ka wax soo saarka sida Deposition ama Epitaxy.

Qaab dhismeedkeeda waxaa ka mid ah sida caadiga ah cylindrical ama qaab yar oo foosto ah, oogada ayaa leh meelo badan oo jeebab ah ama meelo lagu dhejiyo maraqa, waxay noqon kartaa naqshad adag ama godan, taas oo ku xidhan habka kuleylka.

Hawlaha ugu muhiimsan ee susceptor barrel epitaxial:

-Taageerada substrate-ka: waxay si badbaado leh u haysaa wafers semiconductor badan;
-Isha kulaylka: waxay bixisaa heerkul sare oo looga baahan yahay koritaanka iyada oo loo marayo kuleylka;
Labbiska heerkulka: waxay hubisaa kuleylinta isku midka ah ee substrates;
-wareejin: badiyaa wareegtaa inta lagu jiro korriinka si loo hagaajiyo heerkulka iyo qaybinta gaaska isku midka ah.

Mabda'a shaqada ee Epi graphite barrel susceptor:
- In reactor-ka epitaxial, susceptor foosto waxaa lagu kululeeyaa heerkulka loo baahan yahay (sida caadiga ah 1000 ℃-1200 ℃ ee silicon epitaxy);
-Dheeriyaha foostada ayaa wareegta si loo hubiyo qaybinta heerkulka isku midka ah iyo socodka gaaska;
-Gaasaska falcelintu waxay ku qurmayaan heerkul sare, samaynta lakabyo epitaxial oo ku yaal dusha sare ee substrate.

Codsiyada:
-Aad loo isticmaalo koritaanka epitaxial silicon
-Sidoo kale lagu dabaqi karo epitaxy ee qalabka kale ee semiconductor sida GaAs, InP, iwm.

Tamarta VET waxay isticmaashaa garaafka nadiifka sare leh oo leh daahan CVD-SiC si kor loogu qaado xasiloonida kiimikada:

Faa'iidooyinka VET Energy Epitaxial Epi Graphite Foosto Susceptor:

-Xasiloonida heerkulka sare;
-Labis kuleyl wanaagsan;
-Waxay isku mar ka shaqayn kartaa substrates badan, hagaajinta waxtarka wax soo saarka;
- Kiimikada aan firfircoonayn, ilaalinta jawi korriin nadiif ah oo sarreeya.