SareeyeSiC Cantilever Paddleee Wafer Processing ay abuurtay vet-china waxay siisaa xal aad u fiican wax soo saarka semiconductor. Qalabkan cantilever-ka ah wuxuu ka samaysan yahay walxo SiC (silicon carbide), iyo adkeysigeeda sare iyo iska caabbinta kulaylku waxay awood u siinaysaa inay sii wado waxqabadka heersare ah ee heerkulka sare iyo jawiga daxalka leh. Naqshadeynta Paddle Cantilever waxay u oggolaaneysaa maraqa in si la isku halleyn karo loo taageero inta lagu guda jiro howsha, taasoo yareyneysa khatarta kala-goynta iyo burburka.
SiC Cantilever Paddlewaa qayb gaar ah oo loo isticmaalo qalabka wax soo saarka semiconductor sida foornada oksaydhka, foornada faafinta, iyo foornada annealing, isticmaalka ugu weyni waa rarista waferka iyo dejinta, taageeridda iyo qaadista waferrada inta lagu jiro hababka heerkulka sare.
Qaab dhismeedka guudeeSiCcantileverpcufan: qaab dhismeed cantilever ah, oo ku go'an mid ka mid ah daraf ah oo bilaash ah kan kale, sida caadiga ah wuxuu leeyahay nashqad fidsan oo u eg.
Tamarta VET waxay isticmaashaa saabuunta silikoon carbide oo nadiif ah oo nadiif ah si loo dammaanad qaado tayada.
| Astaamaha jireed ee Silicon Carbide dib loo soo celiyay | |
| Hanti | Qiimaha caadiga ah |
| Heerkulka shaqada (°C) | 1600°C (oo oksijiin leh), 1700°C (hoos u dhaca deegaanka) |
| nuxurka SiC | > 99.96% |
| Ka kooban Si bilaash ah | <0.1% |
| Cufnaanta weyn | 2.60-2.70 g/cm3 |
| Borosity muuqda | <16% |
| Xoog cadaadis | > 600MPa |
| Xoog laabashada qabow | 80-90 MPa (20°C) |
| Xoog foorarsi kulul | 90-100 MPa (1400°C) |
| Balaadhinta kulaylka @1500°C | 4.70 10-6/°C |
| Dhaqdhaqaaqa kulaylka @1200°C | 23W/m•K |
| modules laastikada | 240 GPA |
| Iska caabbinta shoogga kulaylka | Aad u wanaagsan |
Faa'iidooyinka VET Energy's Advanced SiC Cantilever Paddle for Wafer Processing waa:
-Xasilooni heer kul ah oo sarreeya: lagu isticmaali karo deegaanno ka sarreeya 1600 ° C;
-Isku dhafka fidinta kulaylka hooseeya: wuxuu ilaaliyaa xasilloonida cabbirka, yaraynta khatarta wafer-ka;
-Nadiifin sare: khatarta hoose ee wasakhowga birta;
-Inertness kiimikaad: daxalka u adkaysta, ku haboon jawiga gaaska kala duwan;
-Awood sare iyo adayg: Xiro-adkeysiga, nolosha adeeg dheer;
Heerarka kulaylka wanaagsan: waxay ka caawisaa kulaylinta wafer
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