Tantalum carbide yakavharwa susceptor yewafer

Tsanangudzo Pfupi:

VET Energy Tantalum carbide coated susceptor yewafer ndeyepamusoro-inoita chigadzirwa chakagadzirirwa kupa kunoenderana uye kwakavimbika kuita kwenguva yakareba. Iyo ine yakanyanya kunaka kupisa kupisa uye kufananidzwa kwekupisa, kuchena kwepamusoro, kusamira kwevhu, zvichiita kuti ive mhinduro yakakwana yewafer processing application.


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TaC coating imhando ye tantalum carbide (TaC) yekubikira yakagadzirwa nemuviri vapor deposition tekinoroji, ine zvinotevera maitiro:

1. Kuomarara kwepamusoro: Kuomarara kweTaC kwakakwira, kazhinji kunogona kusvika 2500-3000HV, iko kuomarara kwakaoma.

2. Pfeka kuramba: TaC coating inonyanya kupfeka-inodzivirira, iyo inogona kunyatso kudzikisa kupfeka uye kukuvadzwa kwemechani zvikamu panguva yekushandiswa.

3. Yakanaka yakakwirira tembiricha kuramba: TaC coating inogonawo kuchengetedza kuita kwayo kwakanakisa pasi pemamiriro ekunze ekupisa.

4. Kugadzikana kwakanaka kwemakemikari: TaC yakavhara ine yakanaka kugadzikana kwemakemikari uye inogona kurwisa maitiro akawanda emakemikari, akadai seasidhi uye mabhesi.

6 (3)
Tantalum Carbide CVD Coating EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性

Zvenyama zve TaC coating

密度/ Density

14.3 (g/cm³)

比辐射率 / Chaiyo emssivity

0.3

热膨胀系数 / Thermal yekuwedzera coefficient

6.3 10-6/K

努氏硬度/ Kuoma (HK)

2000 HK

电阻 / Kupikisa

1×10-5 Om*cm

热稳定性 / Thermal kugadzikana

<2500℃

石墨尺寸变化 / Graphite saizi shanduko

-10 ~ -20um

涂层厚度 / Coating ukobvu

≥20um yakajairika kukosha (35um±10um)

 

Ningbo VET Energy Technology Co., Ltd ibhizimusi repamusoro-soro rinotarisa kugadzirwa uye kutengesa kwezvinhu zvepamusoro-soro, zvigadzirwa uye tekinoroji inovhara graphite, silicon carbide, ceramics, kurapwa kwepamusoro uye zvichingodaro. Zvigadzirwa zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, simba idzva, metallurgy, nezvimwewo.

Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.

Tikugashirei noushamwari kuti ushanyire fekitari yedu, ngativei neimwe hurukuro!

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