Tantalum carbide yakavharwa susceptor yewafer

Tantalum carbide coated susceptor for wafer Featured Image

Tsanangudzo Pfupi

Semicera mutungamiri mune yakakwirira tembiricha yekudzivirira zvinhu tekinoroji uye isu tinodada kuunza CVD Tantalum Carbide (TaC) yekubika zvigadzirwa kuti ipe yakavimbika yakakwirira tembiricha yekudzivirira kune yako graphite substrates.Graphite yakanaka kwazvo inodzivirira tembiricha inodzivirira, asi inowanzoitika kune oxidation pakupisa kwakanyanya, iyo isingakwanise kudzivirirwa zvachose kunyangwe muchoto chevacuum.Yedu CVD Tantalum Carbide (TaC) yekupfekedza inogona kudzivirira zvinobudirira oxidation yegraphite substrate uku ichichengetedza yakanakisa tembiricha yekuita.TaC zvakare chinhu chine inert chinogona kuramba kuita nemagasi senge argon uye hydrogen.Bvunza Semicera nhasi kuti udzidze zvakawanda nezve yedu Tantalum Carbide CVD yakavharwa EPI susceptors kuti ive nechokwadi chekugadzikana uye kuvimbika kweyako tembiricha yekushandisa.

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TaC coating imhando ye tantalum carbide (TaC) yekubikira yakagadzirwa nemuviri vapor deposition tekinoroji, ine zvinotevera maitiro:

1. Kuomarara kwepamusoro: Kuomarara kweTaC kwakakwira, kazhinji kunogona kusvika 2500-3000HV, iko kuomarara kwakaoma.

2. Pfeka kuramba: TaC coating inonyanya kupfeka-inodzivirira, iyo inogona kunyatso kudzikisa kupfeka uye kukuvadzwa kwemechani zvikamu panguva yekushandiswa.

3. Yakanaka yakakwirira tembiricha kuramba: TaC coating inogonawo kuchengetedza kuita kwayo kwakanakisa pasi pemamiriro ekushisa kwepamusoro.

4. Kugadzikana kwakanaka kwemakemikari: TaC yakavhara ine yakanaka kugadzikana kwemakemikari uye inogona kurwisa maitiro akawanda emakemikari, akadai seasidhi uye mabhesi.

Tantalum Carbide CVD Coating EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性 Zvenyama zve TaC coating
密度/ Density	14.3 (g/cm³)
比辐射率 / Chaiyo emssivity	0.3
热膨胀系数 / Thermal yekuwedzera coefficient	6.3 10^-6/K
努氏硬度/ Kuoma (HK)	2000 HK
电阻 / Kupikisa	1×10^-5 Om*cm
热稳定性 / Thermal kugadzikana	<2500℃
石墨尺寸变化 / Graphite saizi shanduko	-10 ~ -20um
涂层厚度 / Coating ukobvu	≥20um yakajairika kukosha (35um±10um)

Ningbo VET Energy Technology Co., Ltd ibhizimusi repamusoro-soro rinotarisa kugadzirwa uye kutengesa kwezvinhu zvepamusoro-soro, zvigadzirwa uye tekinoroji inovhara graphite, silicon carbide, ceramics, kurapwa kwepamusoro uye zvichingodaro.Zvigadzirwa zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, simba idzva, metallurgy, nezvimwewo.

Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.

Tikugashirei noushamwari kuti ushanyire fekitari yedu, ngativei neimwe hurukuro!