TaC Yakavharwa Susceptor yeEpitaxy Equipment

TaC Coated Susceptor yeEpitaxy Equipment Inoratidzwa Mufananidzo

Tsanangudzo Pfupi:

VET inopa yakasarudzika tantalum carbide (TaC) machira ezvikamu zvakasiyana uye vatakuri. VET inotungamira yekubatisa maitiro inogonesa tantalum carbide (TaC) machira kuti awane kuchena kwepamusoro, kugadzikana kwekushisa kwepamusoro uye kushivirira kwemakemikari, kuvandudza kunaka kwechigadzirwa cheSIC/GAN makristasi uye EPI akaturikidzana, uye kuwedzera hupenyu hweakakosha mareactor zvikamu. Iko kushandiswa kwetantalum carbide TaC coating ndeyekugadzirisa dambudziko rekumucheto uye kuvandudza kunaka kwekristaro kukura, uye VET yakabudirira kugadzirisa tantalum carbide coating tekinoroji (CVD), ichisvika padanho repamusoro repasi rose.

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TaC yakavharwasubstrate ifirimu rakatetepa rakagadzirwatantalum carbidezvinhu, izvo zvinoshandiswa pamusoro peiyo substrate ye epitaxial midziyo.TaC coatingine zvakawanda zvakanaka zvivakwa, zvichiita kuti ive sarudzo yakanaka.

TaC coating imhando ye tantalum carbide (TaC) yekubikira yakagadzirwa nemuviri vapor deposition tekinoroji, ine zvinotevera maitiro:

1. Kuomarara kwepamusoro: Kuomarara kweTaC kwakakwira, kazhinji kunogona kusvika 2500-3000HV, iko kuomarara kwakaoma.

2. Pfeka kuramba: TaC coating inonyanya kupfeka-inodzivirira, iyo inogona kunyatso kudzikisa kupfeka uye kukuvadzwa kwemechani zvikamu panguva yekushandiswa.

3. Yakanaka yakakwirira tembiricha kuramba: TaC coating inogonawo kuchengetedza kuita kwayo kwakanakisa pasi pemamiriro ekushisa kwepamusoro.

4. Kugadzikana kwakanaka kwemakemikari: TaC yakavhara ine yakanaka kugadzikana kwemakemikari uye inogona kurwisa maitiro akawanda emakemikari, akadai seasidhi uye mabhesi.

碳化钽涂层物理特性物理特性 Zvenyama zve TaC coating
密度/ Density	14.3 (g/cm³)
比辐射率 / Chaiyo emssivity	0.3
热膨胀系数 / Thermal yekuwedzera coefficient	6.3 10^-6/K
努氏硬度/ Kuoma (HK)	2000 HK
电阻 / Kupikisa	1×10^-5 Om*cm
热稳定性 / Thermal kugadzikana	<2500℃
石墨尺寸变化 / Graphite saizi shanduko	-10 ~ -20um
涂层厚度 / Coating ukobvu	≥20um yakajairika kukosha (35um±10um)

Ningbo VET Energy Technology Co., Ltd ibhizimusi repamusoro-soro rinotarisa kugadzirwa uye kutengesa kwezvinhu zvepamusoro-soro, zvigadzirwa uye tekinoroji inovhara graphite, silicon carbide, ceramics, kurapwa kwepamusoro uye zvichingodaro. Zvigadzirwa zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, simba idzva, metallurgy, nezvimwewo.

Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.

Tikugashirei noushamwari kuti ushanyire fekitari yedu, ngativei neimwe hurukuro!