Silicon Carbide Yakaputirwa Wafer Susceptor Disc

Tsanangudzo Pfupi:

VET Energy silicon carbide coated wafer susceptor disc ndeyepamusoro-inoshanda chigadzirwa chakagadzirirwa kupa kunoenderana uye kwakavimbika kuita kwenguva yakareba. Iyo ine yakanyanya kunaka kupisa kupisa uye kufananidzwa kwekupisa, kuchena kwepamusoro, kusamira kwevhu, zvichiita kuti ive mhinduro yakakwana yewafer processing application.


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Silicon Carbide Wafer Disc chinhu chakakosha chinoshandiswa mune dzakasiyana semiconductor kugadzira maitiro. Isu tinoshandisa tekinoroji yedu ine patented kugadzira iyo silicon carbide yakachengeteka disc ine yakanyanya kuchena kuchena, yakanaka coating kufanana uye yakanakisa hupenyu hwesevhisi, pamwe nekukwirira kwemakemikari kuramba uye kugadzikana kwemafuta.

VET Energy ndiyo chaiyo inogadzira yakagadziridzwa magirafu uye silicon carbide zvigadzirwa zvine machira akasiyana seSiC, TaC, pyrolytic kabhoni, girazi-kabhoni, zvichingodaro, inogona kupa akasiyana akagadziridzwa zvikamu zve semiconductor uye photovoltaic indasitiri. Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.

Isu tinoramba tichigadzira maitiro epamberi ekupa zvimwe zvepamberi zvinhu, uye takagadzira yakasarudzika tekinoroji, iyo inogona kuita kuti chisungo pakati pekupotera neiyo substrate ive yakasimba uye isinganyanye kubatwa.

Fmadyiro ezvigadzirwa zvedu:

1. High tembiricha oxidation kuramba kusvika 1700.
2. Kuchena kwepamusoro uyethermal kufanana
3. Yakanakisa corrosion resistance: acid, alkali, munyu uye organic reagents.
4. Kuoma kwepamusoro, compact surface, yakanaka particles.
5. Hupenyu hurefu hwebasa uye hunogara kwenguva refu

CVD SiC薄膜基本物理性能

Basic zvemuviri zvimiro zveCVD SiCcoating

性质 / Property

典型数值 / Typical Value

晶体结构 / Crystal Mamiriro

FCC β chikamu多晶,主要為(111)取向

密度 / Density

3.21 g/cm³

硬度 / Kuoma

2500 维氏硬度 (500g mutoro)

晶粒大小 / Zviyo SiZe

2~10μm

纯度 / Kemikari Kuchena

99.99995%

热容 / Kupisa Kugona

640 J·kg-1·K-1

升华温度 / Sublimation Temperature

2700 ℃

抗弯强度 / Flexural Simba

415 MPa RT 4-poindi

杨氏模量 / Young's Modulus

430 Gpa 4pt bend, 1300 ℃

导热系数 / ThermalConductivity

300Wm-1·K-1

热膨胀系数 / Kuwedzera Kupisa (CTE)

4.5 × 10-6K-1

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