KUGADZIRA SEI SILICON WAFER

KUGADZIRA SEI SILICON WAFER

A waferchimedu chesilicon chinenge mirimita mukobvu icho chine nzvimbo yakati sandarara zvakanyanya nekuda kwemaitiro ari kudiwa zvakanyanya. Iko kushandiswa kunotevera kunotarisisa kuti ndeipi nzira yekukura kwekristaro inofanira kushandiswa. Muchiitiko cheCzochralski, semuenzaniso, iyo polycrystalline silicon inonyungudutswa uye penzura-tete mhodzi kristaro inonyikwa musilicon yakanyungudutswa. Mbeu yekristaro inobva yatenderedzwa uye yokweverwa zvishoma nezvishoma kumusoro. Iyo inorema kwazvo colossus, monocrystal, inoguma. Zvinokwanisika kusarudza maitiro emagetsi e monocrystal nekuwedzera zvidimbu zviduku zvepamusoro-kuchena dopants. Iwo makristasi anodonhedzwa zvinoenderana nezvinodiwa nemutengi uye obva akwenenzverwa uye akachekwa kuita zvimedu. Mushure mematanho akasiyana ekuwedzera ekugadzira, mutengi anogashira mawafers ayo akatsanangurwa mupakeji yakakosha, iyo inobvumira mutengi kushandisa wafer nekukurumidza mumutsara wayo wekugadzira.

CZOCHRALSKI PROCESS

Nhasi, chikamu chikuru chesilicon monocrystals inokura maererano neCzochralski process, iyo inosanganisira kunyungudutsa polycrystalline yakakwirira-kuchena silicon mu hyperpure quartz crucible uye kuwedzera dopant (kazhinji B, P, As, Sb). Kristini yembeu yakatetepa, monocrystalline inonyikwa musilicon yakanyungudutswa. Kristini hombe yeCZ inobva yakura kubva pakiristaro iyi nhete. Kunyatso kudzora kweyakanyungudutswa silicon tembiricha uye kuyerera, iyo crystal uye crucible kutenderera, pamwe nekristaro yekudhonza kumhanya inoguma mune yakanyanya kunaka mhando monocrystalline silicon ingot.

FLOAT ZONE METHOD

Mamonocrystals anogadzirwa zvinoenderana neiyo float zone nzira akanakira kushandiswa musimba semiconductor zvikamu, senge IGBTs. Iyo cylindrical polycrystalline silicon ingot yakaiswa pamusoro peiyo induction coil. A radio frequency electromagnetic field inobatsira kunyungudutsa silicon kubva pazasi petsvimbo. Iyo electromagnetic munda inodzora iyo silicon inoyerera nepaburi diki mune induction coil uye ichienda kune monocrystal iri pazasi (float zone nzira). Iyo doping, kazhinji ine B kana P, inowanikwa nekuwedzera gasi zvinhu.


Nguva yekutumira: Jun-07-2021
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