MOCVD Substrate Heater, Zvinhu zvekupisa zveMOCVD,
girafu hita, heater, MOCVD Substrate Heater,
Hupenyu hurefu SIC Yakavharwa Graphite Heater yeMOCVD K465i
Thegirafu hitazvikamu zvinoshandiswa muchoto chekushisa chepamusoro uye tembiricha yakasvika 2200 dhigirii pavacuum nharaunda uye 3000 dhigirii munzvimbo ine deoxidized uye yakaiswa gasi nharaunda.
Zvinhu zvikuru zvegraphiteheater:
1. kufanana kwekupisa chimiro.
2. yakanaka conductivity yemagetsi uye mutoro mukuru wemagetsi.
3. corrosion resistance.
4. inoxidizability.
5. kuchena kwemakemikari yakakwirira.
6. high mechanical simba.
Iyo inobatsira isimba rinoshanda, kukosha kwepamusoro uye kuderera kwekugadzirisa.
Tinogona kuburitsa anti-oxidation uye hupenyu hurefu hurefu hwe graphite crucible, graphite mold uye zvese zvikamu zve graphite heater.
Zvikamu zvikuru zve graphite heater:
Kutsanangurwa Kwehunyanzvi | VET-M3 |
Hukuru Density (g/cm3) | ≥1.85 |
Zvemukati zveMadota (PPM) | ≤500 |
Shore Hardness | ≥45 |
Chaicho Kuramba (μ.Ω.m) | ≤12 |
Flexural Strength (Mpa) | ≥40 |
Compressive Strength (Mpa) | ≥70 |
Max. Saizi yezviyo (μm) | ≤43 |
Coefficient of Thermal Expansion Mm/°C | ≤4.4*10-6 |
Graphite heater yevira remagetsi ine zvimiro zvekudzivirira kupisa, oxidation kuramba, yakanaka conductivity yemagetsi uye nani mechanic intensity. Tinogona kudhiza mhando dzakasiyana dze graphite heater zvinoenderana nemagadzirirwo evatengi.