Yakanaka mhando Silicon Carbide RBSIC/SISIC Cantilever Paddle Inoshandiswa muSolar Photovoltaic Indasitiri

Tsanangudzo Pfupi:

Yakakosha mabhenefiti eSiC-yakavharwa graphite susceptors anosanganisira yakanyanya kuchena kuchena, homogenous coating uye yakanakisa hupenyu hwesevhisi. Vanewo high chemical resistance and thermal stability properties.

Isu tinochengetedza kushivirira kwepedyo kana tichishandisa iyo SiC coating, tichishandisa yakakwirira-chaiyo machining kuti ive nechokwadi cheunifomu susceptor mbiri. Isu zvakare tinogadzira zvinhu zvine akanakira emagetsi kuramba zvivakwa zvekushandisa mune inductively heated masisitimu. Zvese zvikamu zvakapedzwa zvinouya nekuchena uye dimensional yekutevedzera chitupa.


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Maturusi anofambiswa zvakanaka, vashandi vepurofiti yenyanzvi, uye zvirinani zvakanyanya mushure mekutengesa zvigadzirwa nemasevhisi; Isu tanga zvakare takabatana vakaroorana uye vana, munhu wese anonamatira kukambani kubatsirwa "kubatana, kuzvipira, kushivirira" kune Yakanaka mhando Silicon Carbide RBSIC/SISIC Cantilever Paddle Inoshandiswa muSolar Photovoltaic Indasitiri, Tinogamuchira nemwoyo wose vaviri vekunze uye vepamba. bhizinesi bhizinesi shamwari, uye ndinovimba kushanda newe munguva iri pedyo kusvika kureba!
Maturusi anofambiswa zvakanaka, vashandi vepurofiti yenyanzvi, uye zvirinani zvakanyanya mushure mekutengesa zvigadzirwa nemasevhisi; Isu tanga takabatana vakaroorana uye vana, munhu wese anonamatira kukambani inobatsira "kubatana, kuzvipira, kushivirira"China Refractory ceramic uye ceramic kiln, Kusangana nezvinodiwa zveakasarudzika munhu vatengi kune yega yega sevhisi yakakwana uye yakagadzikana mhando zvinhu. Isu tinogashira neushamwari vatengi pasi rese kuti vatishanyira, nekudyidzana kwedu kwakawanda, uye takabatana kugadzira misika mitsva, kugadzira ramangwana rakajeka!

SiC yakavharidzirwa / yakavharwa yeGraphite substrate yeSemiconductor
 
Masusceptors anobata uye anopisa semiconductor wafers panguva yekupisa kwekupisa. A susceptor inogadzirwa nechinhu chinotora simba nekupinza, conduction, uye / kana radiation uye inopisa wafer. Kupisa kwayo kutyisa kupikisa, kupisa kwemafuta, uye kuchena kwakakosha pakukurumidza kupisa kwemafuta (RTP). Silicon carbide yakavharwa graphite, silicon carbide (SiC), uye silicon (Si) inowanzoshandiswa kune susceptors zvichienderana neiyo chaiyo inopisa uye makemikari nharaunda. PureSiC® CVD SiC uye ClearCarbon ™ yekupedzisira-yakachena zvinhu iyo inopa kugadzikana kwepamusoro ekupisa, kuramba kwecorrosion, uye kusimba.
Product Description

SiC yekupfekedza yeGraphite substrate yeSemiconductor application inoburitsa chikamu chine kuchena kwepamusoro uye kuramba kune oxidizing mamiriro.
CVD SiC kana CVI SiC inoiswa kune Graphite yezvakareruka kana zvakaoma dhizaini zvikamu. Coating inogona kuiswa muhukobvu hwakasiyana uye kune zvikamu zvakakura kwazvo.

SiC yakavharidzirwa / yakavharwa yeGraphite substrate yeSemiconductor

Technical ceramics isarudzo yechisikigo kune semiconductor thermal processing application inosanganisira RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, uye annealing. CoorsTek inopa epamberi zvinhu zvemukati zvakagadzirirwa kumirisana nekupisa kwekushisa nepamusoro-kuchena, yakasimba, inodzokororwa kuita kwepamusoro-tembiricha.

 Features: 
· Yakanakisa Thermal Shock Resistance
· Yakanakisa Physical Shock Resistance
· Yakanakisa Chemical Resistance
· Super High Kuchena
· Kuwanikwa muComplex Shape
· Inoshandiswa pasi peOxidizing Atmosphere

application:

3

Wafer inoda kupfuura nematanho akati wandei isati yagadzirira kushandiswa mumidziyo yemagetsi. Imwe nzira yakakosha ndeye silicon epitaxy, umo mawaferi anotakurwa pamagraphite susceptors. Zvimiro uye hunhu hwema susceptors zvine mhedzisiro yakakosha pamhando yewafer's epitaxial layer.

Yakajairika Properties yeBase Graphite Material:

Inooneka Density: 1.85 g/cm3
Electrical Resistivity: 11 μΩm
Flexural Strenth: 49 MPa (500kgf/cm2)
Shore Hardness: 58
Madota: <5ppm
Thermal Conductivity: 116 W/mK (100 kcal/mhr-℃)

 

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