CVD TaC yakavharwa ndiro susceptor

Tsanangudzo Pfupi:

VET Energy CVD TaC yakavharwa ndiro susceptor ndeyepamusoro-inoshanda chigadzirwa chakagadzirirwa kupa kunoenderana uye kwakavimbika kuita kwekufamba kwenguva. Iyo ine yakanyanya kunaka kupisa kupisa uye kufananidzwa kwekupisa, kuchena kwepamusoro, kusamira kwevhu, zvichiita kuti ive mhinduro yakakwana yewafer processing application.


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TheCVD TaC CoatedPlate Susceptor kubva kuvet-china inogadzirwa kuti iite yepamusoro-soro mumakemikari vapor deposition (CVD) maitiro. Iyi susceptor inoratidzira yakasimbaTaC (Tantalum Carbide) kupfeka, inopa kugadzikana kwekupisa kwekupisa, kupikisa makemikari, uye kusimba, zvichiita kuti ive mhinduro yakanaka yekugadzira semiconductor uye yakakwirira-tembiricha application. TheCVD TaC coatinginochengetedza kupikisa kwakanakisa kune oxidation uye kupfeka, ichibvumira susceptor kuchengetedza kutendeseka kwayo uye kushanda munzvimbo dzakaoma.

vevet-china'sCVD TaC CoatedPlate Susceptor inomira pachena nekuda kwekugona kwayo kugovera kupisa zvakaenzana panguva yeCVD maitiro, kuve nechokwadi chechokwadi chekuisa dhizaini uye kusimudzira kugona kwekugadzira semiconductor. Iyo Ta-C coating inopa imwe dziviriro kubva mukuora kwemakemikari, kuwedzera hupenyu hweiyo susceptor uye nekuvandudza kuita kwese. Iine musanganiswa wepamusoro CVD susceptor tekinoroji uye yepamusoro-mhando yeTaC kemikari coating, iyi susceptor chinhu chakakosha kune maindasitiri anoda kunyatso uye kuvimbika munzvimbo dzepamusoro-tembiricha.

Ingave yakashandiswa mukugadzira semiconductors kana zvimwe zvemhando yepamusoro-tech application, iyoCVD TaC Yakaputirwa Plate Susceptoryakagadzirirwa kuzadzisa zvinodiwa nekugadzirwa kwemazuva ano. Inotsigirwa nemukurumbira weSemicera wekuvandudza uye mhando, chigadzirwa ichi chinopa hukuru hwekuita uye kusimba kwenguva refu, zvichiita kuti ive sarudzo yakavimbika yeCVD maitiro.

TaC coating imhando ye tantalum carbide (TaC) yekubikira yakagadzirwa nemuviri vapor deposition tekinoroji, ine zvinotevera maitiro:

1. Kuomarara kwepamusoro: Kuomarara kweTaC kwakakwira, kazhinji kunogona kusvika 2500-3000HV, iko kuomarara kwakaoma.

2. Pfeka kuramba: TaC coating inonyanya kupfeka-inodzivirira, iyo inogona kunyatso kudzikisa kupfeka uye kukuvadzwa kwemechani zvikamu panguva yekushandiswa.

3. Yakanaka yakakwirira tembiricha kuramba: TaC coating inogonawo kuchengetedza kuita kwayo kwakanakisa pasi pemamiriro ekushisa kwepamusoro.

4. Kugadzikana kwakanaka kwemakemikari: TaC yakavhara ine yakanaka kugadzikana kwemakemikari uye inogona kurwisa maitiro akawanda emakemikari, akadai seasidhi uye mabhesi.

TaC Coating13
TaC Coating10

碳化钽涂层物理特性物理特性

Zvenyama zve TaC coating

密度/ Density

14.3 (g/cm³)

比辐射率 / Chaiyo emssivity

0.3

热膨胀系数 / Thermal yekuwedzera coefficient

6.3 10-6/K

努氏硬度/ Kuoma (HK)

2000 HK

电阻 / Kupikisa

1×10-5 Om*cm

热稳定性 / Thermal kugadzikana

<2500℃

石墨尺寸变化 / Graphite saizi shanduko

-10 ~ -20um

涂层厚度 / Coating ukobvu

≥20um yakajairika kukosha (35um±10um)

Ningbo VET Energy Technology Co., Ltd ibhizimusi repamusoro-soro rinotarisa kugadzirwa uye kutengesa kwezvinhu zvepamusoro-soro, zvigadzirwa uye tekinoroji inovhara graphite, silicon carbide, ceramics, kurapwa kwepamusoro uye zvichingodaro. Zvigadzirwa zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, simba idzva, metallurgy, nezvimwewo.

Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.

Tikugashirei noushamwari kuti ushanyire fekitari yedu, ngativei neimwe hurukuro!

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