CVD Silicon Carbide Yakaputirwa Graphite Ring

CVD Silicon Carbide Yakavharwa Graphite Ring Featured Image

Tsanangudzo Pfupi:

VET Energy silicon carbide yakavharwa graphite mhete ndeyepamusoro-inoshanda chigadzirwa chakagadzirirwa kupa kunoenderana uye kwakavimbika kuita kwekufamba kwenguva. Iyo ine yakanyanya kunaka kupisa kupisa uye kufananidzwa kwekupisa, kuchena kwepamusoro, kusamira kwevhu, zvichiita kuti ive mhinduro yakakwana yewafer processing application.

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Yakajairika Properties yeBase Graphite Material:

Inooneka Density:	1.85 g/cm3
Electrical Resistivity:	11 μΩm
Flexural Strenth:	49 MPa (500kgf/cm2)
Shore Hardness:	58
Madota:	<5ppm
Thermal Conductivity:	116 W/mK (100 kcal/mhr-℃)

Isu tinopa akasiyana susceptors uye graphite zvikamu kune ese aripo epitaxy reactor. Zvigadzirwa zvedu zvinosanganisira mbiya susceptors yeLPE mayuniti, pancake susceptors yeLPE, CSD, uye Gemini mayunitsi, uye imwe-wafer susceptors yeakaiswa uye ASM zvikamu.

Nekubatanidza kudyidzana kwakasimba neanotungamira maOEM, hunyanzvi hwekugadzira uye ruzivo rwekugadzira, vet inopa iyo yakakwana dhizaini yechishandiso chako.

VET Energy ndizvo themugadziri chaiye weakagadziridzwa graphite uye silicon carbide zvigadzirwa neCVD coating,anogona kupazvakasiyana-siyanazvakagadzirirwa zvikamu zve semiconductor uye photovoltaic indasitiri. Our tekinoroji timu inobva kumatunhu epamusoro ekutsvagisa dzimba, inogona kupa mamwe hunyanzvi zvinhu mhindurozvako.

Fmadyiro ezvigadzirwa zvedu:

1. High tembiricha oxidation kuramba kusvika 1700℃.
2. Kuchena kwepamusoro uyethermal kufanana
3. Yakanakisa corrosion resistance: acid, alkali, munyu uye organic reagents.
4. Kuoma kwepamusoro, compact surface, yakanaka particles.
5. Hupenyu hurefu hwebasa uye hunogara kwenguva refu

CVD SiC薄膜基本物理性能 Basic zvemuviri zvimiro zveCVD SiCcoating
性质 / Property	典型数值 / Typical Value
晶体结构 / Crystal Mamiriro	FCC β chikamu多晶，主要為（111）取向
密度 / Density	3.21 g/cm³
硬度 / Kuoma	2500 维氏硬度 (500g mutoro)
晶粒大小 / Zviyo SiZe	2~10μm
纯度 / Kemikari Kuchena	99.99995%
热容 / Kupisa Kugona	640 J·kg^-1·K^-1
升华温度 / Sublimation Temperature	2700 ℃
抗弯强度 / Flexural Simba	415 MPa RT 4-poindi
杨氏模量 / Young's Modulus	430 Gpa 4pt bend, 1300 ℃
导热系数 / ThermalConductivity	300Wm^-1·K^-1
热膨胀系数 / Kuwedzera Kupisa (CTE)	4.5 × 10^-6K^-1