The Sintered Silicon Carbide (SiC) Crystal/Wafer Boat is designed for the rigorous demands of semiconductor and microelectronics industries. It provides a secure platform for handling silicon crystals and wafers during high-temperature processing, ensuring their integrity and purity are maintained throughout.
Key Features
- Outstanding Thermal Stability: Capable of enduring temperatures up to 1600°C, ideal for processes that require precise thermal control.
- Superior Chemical Resistance: Resistant to most corrosive chemicals and gases, providing durability in harsh processing environments.
- Robust Mechanical Strength: Maintains structural integrity under high stress, reducing the likelihood of deformation or breakage.
- Minimal Thermal Expansion: Designed to minimize the risk of thermal shock and cracking, offering reliable performance over extended use.
- Precision Manufacturing: Crafted with high precision to meet specific process requirements and accommodate various crystal and wafer sizes.
Applications
• Semiconductor wafer processing
• LED manufacturing
• Photovoltaic cell production
• Chemical vapor deposition (CVD) systems
• Research and development in material science
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烧结碳化硅物理特性 Physical properties of Sintered Silicon Carbide |
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性质 / Property |
典型数值 / Typical Value |
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化学成分 / Chemical Composition |
SiC>95%, Si<5% |
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体积密度 / Bulk Density |
>3.07 g/cm³ |
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显气孔率 / Apparent porosity Apparent porosity |
<0.1% |
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常温抗弯强度 / Modulus of rupture at 20℃ |
270 MPa |
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高温抗弯强度 / Modulus of rupture at 1200℃ |
290 MPa |
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硬度 / Hardness at 20℃ |
2400 Kg/mm² |
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断裂韧性 / Fracture toughness at 20% |
3.3 MPa · m1/2 |
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导热系数 / Thermal Conductivity at 1200℃ |
45 w/m .K |
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热膨胀系数 / Thermal expansion at 20-1200℃ |
4.5 1 ×10-6/℃ |
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最高工作温度 / Max.working temperature |
1400℃ |
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热震稳定性 / Thermal shock resistance at 1200℃ |
Good |
Why Choose Our Sintered Silicon Carbide (SiC) Crystal/Wafer Boat?
Choosing our SiC Crystal/Wafer Boat means opting for reliability, efficiency, and longevity. Each boat undergoes strict quality control measures to ensure it meets the highest standards of the industry. This product not only enhances the safety and productivity of your manufacturing process but also guarantees the consistent quality of your silicon crystals and wafers. With our SiC Crystal/Wafer Boat, you can trust in a solution that supports your operational excellence.
