Silicon Carbide Coating Graphite Tray Plate and Cover

VET Energy Silicon Carbide Coating Graphite Tray, Plate, and Cover is engineered to deliver top-tier performance, providing reliable and consistent operation over extended use, making it an essential choice for wafer processing applications in the semiconductor industry. This high-performance Silicon Carbide Coating Graphite Plate boasts exceptional heat resistance, superior thermal uniformity, and outstanding chemical stability, particularly in high-temperature conditions. Its high-purity construction, coupled with advanced erosion resistance, makes it indispensable for demanding environments such as MOCVD susceptors.

Key Features of Silicon Carbide Coating Graphite Tray, Plate, and Cover

1. High-Temperature Oxidation Resistance: Withstands temperatures up to 1700℃, enabling it to perform reliably in extreme conditions.

2. High Purity and Thermal Uniformity: Consistent high purity and even heat distribution are crucial for MOCVD applications.

3. Exceptional Corrosion Resistance: Resistant to acids, alkalis, salts, and various organic reagents, ensuring long-term stability in diverse environments.

4. High Hardness and Compact Surface: Features a dense surface with fine particles, improving overall durability and resistance to wear.

5. Extended Service Life: Engineered for longevity, outperforming conventional silicon carbide-coated graphite susceptors in harsh semiconductor processing environments.

VET Energy’s Expertise in Customized Graphite and Silicon Carbide Solutions

As a trusted manufacturer, VET Energy specializes in custom-designed graphite susceptors and silicon carbide coating solutions. We offer a range of products tailored for the semiconductor and photovoltaic industries, including SiC-coated graphite components like trays, plates, and covers. Our product lineup also includes diverse coating options, such as SiC coating for MOCVD, TaC coating, glassy carbon coating, and pyrolytic carbon coating, ensuring we meet the varying demands of high-tech industries.

Our experienced technical team, comprising experts from top domestic research institutions, provides comprehensive material solutions for clients. We continuously refine our advanced processes, including an exclusive patented technology that enhances bonding between the silicon carbide coating and the graphite substrate, reducing the risk of detachment and further extending the product’s life.

Applications and Benefits in Semiconductor Manufacturing

The Silicon Carbide Coating for MOCVD makes these graphite susceptors highly effective in high-temperature, corrosive environments. Whether used as graphite wafer carriers or other MOCVD components, these silicon carbide-coated susceptors demonstrate superior durability and performance. For those seeking reliable solutions in the SiC-coated graphite susceptor market, VET Energy’s silicon carbide-coated graphite tray, plate, and cover offer a robust and versatile option that meets the rigorous demands of the semiconductor industry.

By focusing on advanced material science, VET Energy is committed to delivering high-performance SiC-coated graphite solutions that drive innovation in semiconductor processing and ensure reliable performance in all MOCVD-related applications.

VET Energy is the real manufacturer of customized graphite and silicon carbide products with different coatings like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc., can supply various customized parts for semiconductor and photovoltaic industry. 

Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

We continuously develop advanced processes to provide more advanced materials, and have worked out an exclusive patented technology, which can make the bonding between the coating and the substrate tighter and less prone to detachment.

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