UBURYO BWO GUKORA SILICON WAFER

UBURYO BWO GUKORA SILICON WAFER

A waferni agace ka silicon hafi ya milimetero 1 z'ubugari ifite ubuso buringaniye cyane bitewe nuburyo bukenewe mubuhanga. Imikoreshereze ikurikira igena uburyo bwo gukura bwa kristu bugomba gukoreshwa. Mubikorwa bya Czochralski, kurugero, silicon polycrystalline irashonga hanyuma ikaramu yoroheje yimbuto ikaramu ikarishye muri silikoni yashongeshejwe. Imbuto ya kirisiti noneho irazunguruka kandi ikururwa buhoro buhoro hejuru. Colosus iremereye cyane, monocrystal, ibisubizo. Birashoboka guhitamo monocrystal ibiranga amashanyarazi wongeyeho uduce duto twa dopants-yera cyane. Crystal ikoporowe ikurikije ibisobanuro byabakiriya hanyuma igasukurwa hanyuma igabanywamo ibice. Nyuma yinyongera zinyuranye zibyara umusaruro, umukiriya yakira wafer yihariye mugupakira bidasanzwe, byemerera umukiriya gukoresha wafer ako kanya kumurongo wacyo.

GUKORA CZOCHRALSKI

Muri iki gihe, igice kinini cya monocrystal ya silicon gihingwa ukurikije inzira ya Czochralski, ikubiyemo gushonga silikoni polycrystalline ifite isuku nyinshi muri hyperpure quartz ikomeye kandi ikongeramo dopant (mubisanzwe B, P, As, Sb). Imbuto yoroheje, monocrystalline imbuto ya kirisiti yinjizwa muri silikoni yashonze. Kinini nini ya CZ noneho ikura kuva muri kristu yoroheje. Kugena neza ubushyuhe bwa silicon yashongeshejwe no gutemba, kristu no kuzunguruka cyane, kimwe no gukurura umuvuduko wa kirisiti bivamo ingirakamaro ya monocrystalline silicon ingot.

UBURYO BWO KUNYURANYA

Monocrystal yakozwe ikurikije uburyo bwa float zone nuburyo bwiza bwo gukoresha mubikoresho bya semiconductor power, nka IGBTs. Imashini ya silindrike polycrystalline silicon ingot yashyizwe hejuru ya coil induction. Umuyoboro wa radiyo yumurongo wa elegitoroniki ifasha gushonga silikoni kuva hepfo yinkoni. Umwanya wa electromagnetique ugenga urujya n'uruza rwa silicon unyuze mu mwobo muto muri coil induction no kuri monocrystal iri munsi (uburyo bwa float zone). Doping, mubisanzwe hamwe na B cyangwa P, bigerwaho hongewemo ibintu bya gaze.