Ibintu bisanzwe bya Base Graphite Ibikoresho:
Ubucucike bugaragara: | 1,85 g / cm3 |
Kurwanya amashanyarazi: | 11 μΩm |
Icyerekezo cyoroshye: | 49 MPa (500kgf / cm2) |
Gukomera ku nkombe: | 58 |
Ivu: | <5ppm |
Amashanyarazi: | 116 W / mK (100 kcal / mhr- ℃) |
Dutanga susceptors zitandukanye hamwe nibice bya grafite kubintu byose bigezweho.Ibicuruzwa byacu birimo ibishishwa bya barriel kubice bya LPE, ibibyimba bya pancake kubice bya LPE, CSD, na Gemini, hamwe na wafer imwe ya wafer kubikoresho byakoreshejwe na ASM.
Muguhuza ubufatanye bukomeye hamwe na OEM iyobora, ubuhanga bwibikoresho no gukora ubumenyi-buryo, vet itanga igishushanyo cyiza kubyo usaba.
Ingufu za VET ni iuruganda nyarwo rukora ibicuruzwa bya grafite na silicon karbide hamwe na CVD,irashobora gutangazitandukanyeibice byabigenewe bya semiconductor ninganda zifotora. Our tekinike tekinike iva mubigo byubushakashatsi byo murugo, birashobora gutanga ibisubizo byumwuga byinshikuri wewe.
Fibiryo byibicuruzwa byacu:
1. Ubushyuhe bwo hejuru bwa okiside igera kuri 1700℃.
2. Isuku ryinshi kandiuburinganire bwumuriro
3. Kurwanya ruswa nziza: aside, alkali, umunyu na reagent.
4. Gukomera cyane, hejuru yuzuye, ibice byiza.
5. Kuramba kuramba kandi biramba
CVD SiC薄膜 基本 物理 性能 Ibyingenzi bifatika bya CVD SiCgutwikira | |
性质 / Umutungo | 典型 数值 / Agaciro gasanzwe |
晶体 结构 / Imiterere ya Crystal | FCC β icyiciro多 晶 , 主要 为 (111) 取向 |
密度 Ubucucike | 3.21 g / cm³ |
硬度 / Gukomera | 2500 维 氏 硬度 (500g umutwaro) |
晶粒 大小 / Ibinyampeke SiZe | 2 ~ 10 mm |
纯度 / Ubuziranenge bwa Shimi | 99.99995% |
热 容 / Ubushyuhe | 640 J · kg-1· K.-1 |
升华 温度 / Ubushyuhe bwo hejuru | 2700 ℃ |
抗弯 强度 / Imbaraga zoroshye | 415 MPa RT amanota 4 |
杨氏 模 量 / Modulus | 430 Gpa 4pt yunamye, 1300 ℃ |
导热 系数 / ThermalImyitwarire | 300W · m-1· K.-1 |
热 膨胀 系数 Kwagura Ubushyuhe (CTE) | 4.5 × 10-6K-1 |
Murakaza neza cyane gusura uruganda rwacu, reka tuganire kubindi biganiro!