Professional China China Sic Boat Carry Silicon Wafers Into The High Temperature Diffusion Coating Furnace Tube

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The incredibly rich projects administration experiences and a person to 1 service model make the substantial importance of organization communication and our easy understanding of your expectations for Professional China China Sic Boat Carry Silicon Wafers Into The High Temperature Diffusion Coating Furnace Tube, Our ultimate goal is always to rank as a top brand and also to lead as a pioneer in our field. We are sure our productive experience in tool creation will get customer’s trust, Wish to co-operate and co-create an even better long term with you!
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Product Description

Silicon carbide Wafer Boat are widely used as a wafer holder in high temperature diffusion process.

Advantages:

High temperature resistance: normal use at 1800 ℃

High thermal conductivity:  equivalent to graphite material

High hardness:  hardness second only to diamond, boron nitride

Corrosion resistance: strong acid and alkali have no corrosion to it, the corrosion resistance is better than tungsten carbide and alumina

Light weight:  low density, close to aluminum

No deformation:  low coefficient of thermal expansion

Thermal shock resistance:  it can withstand sharp temperature changes, resist thermal shock, and has stable performance

 

Physical Properties Of SiC

Property Value Method
Density 3.21 g/cc Sink-float and dimension
Specific heat 0.66 J/g °K Pulsed laser flash
Flexural strength 450 MPa560 MPa 4 point bend, RT4 point bend, 1300°
Fracture toughness 2.94 MPa m1/2 Microindentation
Hardness 2800 Vicker’s, 500g load
Elastic ModulusYoung’s Modulus 450 GPa430 GPa 4 pt bend, RT4 pt bend, 1300 °C
Grain size 2 – 10 µm SEM

 

Thermal Properties Of SiC

Thermal Conductivity 250 W/m °K Laser flash method, RT
Thermal Expansion (CTE) 4.5 x 10-6 °K Room temp to 950 °C, silica dilatometer

 

 

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