PECVD Loading Tray Deposition Graphite Tray

Short Description:

VET Energy’s PECVD Loading Tray is designed to provide secure and even support for wafers during deposition, improving the consistency and quality of the deposition process. With its excellent heat resistance, the Graphite Tray helps maintain a controlled environment inside PECVD chambers, reducing the risk of contamination and ensuring high process efficiency.

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Product Detail

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VET Energy PECVD loading tray is a precision carrier designed for PECVD (plasma enhanced chemical vapor deposition) process. This high-quality deposition graphite tray is made of high-purity, high-density graphite material. It has excellent high temperature resistance, corrosion resistance, dimensional stability and other characteristics. It can provide a stable carrier platform for PECVD process and ensure the uniformity and flatness of film deposition.

VET Energy PECVD loading trays are widely used in semiconductor, photovoltaic, LED and other fields. For example:

▪ Semiconductor: PECVD process for semiconductor materials such as silicon wafers and epitaxial wafers.

▪ Photovoltaic: PECVD process for solar cell thin films.

▪ LED: PECVD process for LED chips.

Product Advantages

▪ Improve film quality: Ensure uniform film deposition and improve film quality.

▪ Extend equipment life: Excellent corrosion resistance, extend the service life of PECVD equipment.

▪ Reduce production costs: High-quality graphite trays can reduce scrap rate and reduce production costs.

Graphite material from SGL:

Typical parameter: R6510
Index	Test standard	Value	Unit
Average grain size	ISO 13320	10	μm
Bulk density	DIN IEC 60413/204	1.83	g/cm³
Open porosity	DIN66133	10	%
Medium pore size	DIN66133	1.8	μm
Permeability	DIN 51935	0.06	cm²/s
Rockwell hardness HR5/100	DIN IEC60413/303	90	HR
Specific electrical resistivity	DIN IEC 60413/402	13	μΩm
Flexural strength	DIN IEC 60413/501	60	MPa
Compressive strength	DIN 51910	130	MPa
Young's modulus	DIN 51915	11.5×10³	MPa
Thermal expansion(20-200℃)	DIN 51909	4.2X10^-6	K^-1
Thermal conductivity (20℃)	DIN 51908	105	Wm^-1K^-1

It is specifically designed for high-efficiency solar cell manufacturing, supporting G12 large-size wafer processing. Optimized carrier design significantly increases throughput, enabling higher yield rates and lower production costs.

Item	Type	Number wafer carrier
PEVCD Grephite boat - The 156 series	156-13 grephite boat	144
	156-19 grephite boat	216
	156-21 grephite boat	240
	156-23 graphite boat	308
PEVCD Grephite boat - The 125 series	125-15 grephite boat	196
	125-19 grephite boat	252
	125-21 grphite boat	280