VET Energy PECVD graphite boat for solar cells is a core consumable designed for the PECVD (plasma enhanced chemical vapor deposition) process of solar cells. The graphite boat is made of high-purity isostatic graphite with a porosity of less than 15% and a surface roughness of Ra≤1.6μm. It has excellent properties such as high temperature resistance, corrosion resistance, and dimensional stability. Excellent dimensional stability and thermal conductivity ensure uniform film deposition and improve battery efficiency. It can provide a stable carrier in a high-temperature and high-pressure PECVD environment to ensure uniform deposition and high quality of solar cell films.
Graphite material from SGL:
|
Typical parameter: R6510 |
|||
| Index | Test standard | Value | Unit |
| Average grain size | ISO 13320 | 10 | μm |
| Bulk density | DIN IEC 60413/204 | 1.83 | g/cm3 |
| Open porosity | DIN66133 | 10 | % |
| Medium pore size | DIN66133 | 1.8 | μm |
| Permeability | DIN 51935 | 0.06 | cm²/s |
| Rockwell hardness HR5/100 | DIN IEC60413/303 | 90 | HR |
| Specific electrical resistivity | DIN IEC 60413/402 | 13 | μΩm |
| Flexural strength | DIN IEC 60413/501 | 60 | MPa |
| Compressive strength | DIN 51910 | 130 | MPa |
| Young's modulus | DIN 51915 | 11.5×10³ | MPa |
| Thermal expansion(20-200℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Thermal conductivity (20℃) | DIN 51908 | 105 | Wm-1K-1 |
It is specifically designed for high-efficiency solar cell manufacturing, supporting G12 large-size wafer processing. Optimized carrier design significantly increases throughput, enabling higher yield rates and lower production costs.
| Item | Type | Number wafer carrier |
| PEVCD Grephite boat - The 156 series | 156-13 grephite boat | 144 |
| 156-19 grephite boat | 216 | |
| 156-21 grephite boat | 240 | |
| 156-23 graphite boat | 308 | |
| PEVCD Grephite boat - The 125 series | 125-15 grephite boat | 196 |
| 125-19 grephite boat | 252 | |
| 125-21 grphite boat | 280 |
