Kuyera kwa ufa wa SiC kudzakhudza kwambiri khalidwe ndi ntchito ya SiC single crystal yomwe imakula ndi njira ya PVT, ndipo zipangizo zopangira ufa wa SiC ndizoyera kwambiri za Si ufa ndi chiyero cha ufa wa C, ndipo chiyero cha ufa cha C chidzakhudza mwachindunji chiyero cha ufa wa SiC.
Zida zomwe zimagwiritsidwa ntchito popanga tona nthawi zambiri zimaphatikizapo flake graphite, petroleum coke ndi inki ya miyala ya microcrystalline. Kukwera kwa chiyero cha graphite, kumapangitsanso mtengo wogwiritsira ntchito. Njira zoyeretsera graphite zitha kugawidwa m'njira zakuthupi ndi njira zama mankhwala. Njira zoyeretsera thupi zimaphatikizapo kuyandama ndi kuyeretsa kutentha kwambiri, ndipo njira zoyeretsera mankhwala zimaphatikizapo njira ya acid-base, njira ya hydrofluoric acid ndi njira yowotcha ya chloride. Pakati pawo, njira yoyeretsera kutentha kwapamwamba ingagwiritse ntchito malo osungunuka kwambiri (3773K) ndi malo otentha a graphite kuti akwaniritse 4N5 ndi chiyero chapamwamba, chomwe chimaphatikizapo evaporation ndi umuna wa zonyansa ndi malo otsika otentha, kuti akwaniritse cholinga cha kuyeretsedwa [6]. Ukadaulo wofunikira wa toner yoyera kwambiri ndikuchotsa zonyansa. Kuphatikizidwa ndi mawonekedwe a kuyeretsedwa kwa mankhwala ndi kuyeretsedwa kwa kutentha kwakukulu, njira yapadera yoyeretsera kutentha kwa kutentha kwa thermochemical yopangidwa ndi zigawo zikuluzikulu imatengedwa kuti ikwaniritse kuyeretsedwa kwa zipangizo za tona, ndipo chiyero cha mankhwala chikhoza kukhala choposa 6N.
Kuchita kwazinthu ndi mawonekedwe ake:
1, mankhwala chiyero≥99.9999% (6N);
2, kukhazikika kwakukulu kwa carbon powder kukhazikika, digiri ya graphitization, zonyansa zochepa;
3, granularity ndi mtundu zitha kusinthidwa malinga ndi ogwiritsa ntchito.
Zomwe zimagwiritsidwa ntchito kwambiri ndi mankhwalawa:
■ kaphatikizidwe wa mkulu chiyero SiC ufa ndi zina olimba gawo kupanga carbide zipangizo
■ Kulima diamondi
■ Zatsopano matenthedwe madutsidwe zipangizo zamagetsi zamagetsi
■ High-mapeto lifiyamu batire cathode zakuthupi
■ Zida zachitsulo zamtengo wapatali zilinso zopangira