Material and structure of graphite boat
Graphite Boat is a high temperature process equipment, which is usually made of high purity graphite material and treated with SiC (silicon carbide) or TaC (tantalum carbide) coating surface to improve the overall equipment’s oxidation resistance, corrosion resistance and service life.
In industrial manufacturing, graphite boats are usually used as carriers for conventional silicon wafers in coating process production. The structure has many boats with a certain interval. There is a very narrow space between two adjacent boats, and the silicon wafers are placed on both sides of the empty door.
Working principle of graphite boat
Because graphite, the material of the graphite boat, has good conductivity and thermal conductivity, an AC voltage is applied between two adjacent boats to form positive and negative electrodes. When there is a certain air pressure and gas in the chamber, a glow discharge occurs between the two boats. The glow discharge can decompose SiH4 and NH3 gas in the space, form Si and N ions, and combine to form SiNx molecules It is deposited on the surface of silicon wafer to achieve the purpose of coating. As a carrier of solar cell antireflection coating, the structure and size of graphite boat directly affect the conversion efficiency and production efficiency of silicon wafer.
Why choose VET Energy?
As China’s leading PECVD graphite boat manufacturer and supplier, after years of technical research and development, VET Energy now has advanced production equipment comparable to Toyo Tanso, SGL Carbon, Mersen, mature technical designers and experienced production personnel, and all materials are imported raw materials.
At present, the graphite boats produced by our company have the characteristics of high efficiency and precise structure. And the spacing of the designed graphite boats is reasonable, so that the silicon wafer coating is uniform, the quality of the silicon wafer is improved in all aspects, and the solar energy conversion efficiency is greatly improved. More importantly, VET Energy can design and produce all kinds of graphite boats required by the current market, and support customized products and technical services, which can definitely meet your various customized PECVD graphite boat product needs.
High Purity PECVD Graphite Boat for Solar Panel
Post time: Apr-08-2021