What is silicon carbide coating？

Silicon carbide coating, commonly known as SiC coating, refers to the process of applying a layer of silicon carbide onto surfaces through methods such as Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), or thermal spraying. This silicon carbide ceramic coating enhances the surface properties of various substrates by imparting exceptional wear resistance, thermal stability, and corrosion protection. SiC is known for its outstanding physical and chemical properties, including a high melting point (approximately 2700℃), extreme hardness (Mohs scale 9), excellent corrosion and oxidation resistance, and exceptional ablation performance.

Key Benefits of Silicon Carbide Coating in Industrial Applications

Due to these features, silicon carbide coating is widely used in fields such as aerospace, weapons equipment, and semiconductor processing. In extreme environments, particularly within the 1800-2000℃ range, SiC coating exhibits remarkable thermal stability and ablative resistance, making it ideal for high-temperature applications. However, silicon carbide alone lacks the structural integrity needed for many applications, so coating methods are employed to leverage its unique properties without compromising component strength. In semiconductor manufacturing, silicon carbide coated elements provide reliable protection and performance stability within equipment used in MOCVD processes.

Common Methods for Silicon Carbide Coating Preparation

Ⅰ● Chemical Vapor Deposition (CVD) Silicon Carbide Coating

In this method, SiC coatings are formed by placing substrates in a reaction chamber, where methyltrichlorosilane (MTS) acts as a precursor. Under controlled conditions—typically 950-1300°C and negative pressure—the MTS undergoes decomposition, and silicon carbide is deposited onto the surface. This CVD SiC coating process ensures a dense, uniform coating with excellent adherence, ideal for high-precision applications in semiconductor and aerospace sectors.

Ⅱ● Precursor Conversion Method (Polymer Impregnation and Pyrolysis – PIP)

Another effective silicon carbide spray coating approach is the precursor conversion method, which involves immersing the pre-treated sample in a ceramic precursor solution. After vacuuming the impregnation tank and pressurizing the coating, the sample is heated, leading to silicon carbide coating formation upon cooling. This method is favored for components requiring uniform coating thickness and enhanced wear resistance.

Physical Properties of Silicon Carbide Coating

Silicon carbide coatings exhibit properties that make them ideal for demanding industrial applications. These properties include:

Thermal Conductivity: 120-270 W/m·K
Coefficient of Thermal Expansion: 4.3 × 10^^(-6) /K (at 20~800℃)
Electrical Resistivity: 10^⁵ – 10^⁶ Ω·cm
Hardness: Mohs scale 9

Applications of Silicon Carbide Coating

In semiconductor manufacturing, silicon carbide coating for MOCVD and other high-temperature processes protects critical equipment, such as reactors and susceptors, by offering both high-temperature resistance and stability. In aerospace and defense, silicon carbide ceramic coatings are applied to components that must withstand high-speed impacts and corrosive environments. Furthermore, silicon carbide paint or coatings can also be used on medical devices that require durability under sterilization procedures.

Why Choose Silicon Carbide Coating？

With a proven record in extending component life, silicon carbide coatings provide unmatched durability and temperature stability, making them cost-effective for long-term use. By choosing a silicon carbide coated surface, industries benefit from decreased maintenance costs, enhanced equipment reliability, and improved operational efficiency.

Why Choose VET ENERGY?

VET ENERGY is a professional manufacturer and factory of silicon carbide coating products in China. The main SiC coating products include silicon carbide ceramic coating heater, CVD Silicon Carbide Coating MOCVD Susceptor, MOCVD Graphite Carrier with CVD SiC Coating, SiC Coated Graphite Base Carriers, Silicon Carbide Coated Graphite Substrate for Semiconductor, SiC Coating/Coated Graphite Substrate/Tray for Semiconductor, CVD SiC Coated Carbon-carbon Composite CFC Boat Mould. VET ENERGY is committed to providing advanced technology and product solutions for the semiconductor industry. We sincerely hope to become your long-term partner in China.