SiC coating can be prepared by chemical vapor deposition (CVD), precursor transformation, plasma spraying, etc. The coating prepared by CHEMICAL vapor deposition is uniform and compact, and has good designability. Using methyl trichlosilane. (CHzSiCl3, MTS) as silicon source, SiC coating prepared by CVD method is a relatively mature method for the application of this coating.
SiC coating and graphite have good chemical compatibility, the difference of thermal expansion coefficient between them is small, using SiC coating can effectively improve the wear resistance and oxidation resistance of graphite material. Among them, stoichiometric ratio, reaction temperature, dilution gas, impurity gas and other conditions have great influence on the reaction.
Post time: Sep-14-2022