SiC coated graphite susceptor is a key component used in various semiconductor manufacturing processes. we use our patented technology to make the susceptor with extremely high purity, good coating uniformity and an excellent service life, as well as high chemical resistance and thermal stability properties.
Features of our products:
1. High temperature oxidation resistance up to 1700℃.
2. High purity and thermal uniformity
3. Excellent corrosion resistance: acid, alkali, salt and organic reagents.
4. High hardness, compact surface, fine particles.
5. Longer service life and more durable
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CVD SiC薄膜基本物理性能 Basic physical properties of CVD SiC coating |
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性质 / Property |
典型数值 / Typical Value |
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晶体结构 / Crystal Structure |
FCC β phase 多晶，主要为（111）取向 |
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密度 / Density |
3.21 g/cm³ |
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硬度 / Hardness |
2500 维氏硬度（500g load） |
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晶粒大小 / Grain SiZe |
2~10μm |
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纯度 / Chemical Purity |
99.99995% |
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热容 / Heat Capacity |
640 J·kg-1·K-1 |
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升华温度 / Sublimation Temperature |
2700℃ |
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抗弯强度 / Flexural Strength |
415 MPa RT 4-point |
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杨氏模量 / Young' s Modulus |
430 Gpa 4pt bend, 1300℃ |
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导热系数 / Thermal Conductivity |
300W·m-1·K-1 |
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热膨胀系数 / Thermal Expansion(CTE) |
4.5×10-6K-1 |
VET Energy is the real manufacturer of customized graphite and silicon carbide products with different coatings like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc., can supply various customized parts for semiconductor and photovoltaic industry.
Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.
We continuously develop advanced processes to provide more advanced materials, and have worked out an exclusive patented technology, which can make the bonding between the coating and the substrate tighter and less prone to detachment.
Warmly welcome you to visit our factory, let's have further discussion!
