Silicon carbide wafer boat is a load-bearing device for wafers, mainly used in solar and semiconductor diffusion processes. It has characteristics such as wear resistance, corrosion resistance, high-temperature impact resistance, resistance to plasma bombardment, high temperature bearing capacity, high thermal conductivity, high heat dissipation, and long-term use that is not easy to bend and deform. Our company uses high-purity silicon carbide material to ensure service life and provides customized designs, including various vertical and horizontal wafer boat.
Material Datasheet
| 材料Material | R-SiC |
| 使用温度Working temperature (°C) | 1600°C ( 氧化气氛Oxidizing environment)1700°C ( 还原气氛Reducing environment) |
| SiC含量SiC content (%) | > 99 |
| 自由Si 含量Free Si content (%) | < 0.1 |
| 体积密度Bulk density (g/cm3) | 2.60-2.70 |
| 气孔率Apparent porosity (%) | < 16 |
| 抗压强度Crushing strength (MPa) | > 600 |
| 常温抗弯强度Cold bending strength (MPa) | 80-90 (20°C) |
| 高温抗弯强度Hot bending strength (MPa) | 90-100 (1400°C) |
| 热膨胀系数Thermal expansion coefficient @1500°C (10-6/°C) | 4.70 |
| 导热系数Thermal conductivity @1200°C (W/m•K) | 23 |
| 杨氏模量Elastic modulus (GPa) | 240 |
| 抗热震性Thermal shock resistance | 很好 Extremely good |
Ningbo VET Energy Technology Co., Ltd is a high-tech enterprise focusing on the production and sales of high-end advanced materials, the materials and technology including graphite, silicon carbide, ceramics, surface treatment and so on. The products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..
Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.
Warmly welcome you to visit our factory, let's have further discussion!
