GaN Epitaxy dabere na silicon

Nkọwa ngwaahịa

Ụlọ ọrụ anyị na-enye ọrụ usoro mkpuchi SiC site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe ndị a na-edebe n'elu ihe ndị a na-ekpuchi, na-akpụ oyi akwa mkpuchi SIC.

Isi atụmatụ:

1. Nguzogide oxidation dị elu:

Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.

2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye mmiri kemịkalụ n'okpuru ọnọdụ chlorination dị elu.

3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.

4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.

Nkọwa isi nke mkpuchi CVD-SIC