SiC mkpuchi graphite MOCVD Wafer ndị na-ebu , Graphite Susceptors makaSiC epitaxy,
Carbon na-enye ihe susceptors, Graphite epitaxy susceptors, Ihe nkwado eserese eserese, MOCVD Susceptor, SiC epitaxy, Wafer Susceptors,
Uru pụrụ iche nke ihe mkpuchi graphite anyị nwere mkpuchi SiC gụnyere ịdị ọcha dị oke elu, mkpuchi homogenous na ndụ ọrụ magburu onwe ya. Ha nwekwara nnukwu nguzogide kemịkalụ na ihe nkwụsi ike ọkụ.
Ihe mkpuchi SiC nke mkpụrụ Graphite maka ngwa Semiconductor na-emepụta akụkụ nwere ịdị ọcha dị elu yana iguzogide ikuku oxidizing.
A na-etinye CVD SiC ma ọ bụ CVI SiC na Graphite nke akụkụ dị mfe ma ọ bụ mgbagwoju anya. Enwere ike itinye mkpuchi mkpuchi na ọkpụrụkpụ dị iche iche yana akụkụ buru ibu.
Atụmatụ:
Ọkachamara Thermal Shock Resistance
Magburu onwe ya nguzogide anụ ahụ
· Magburu onwe Chemical Resistance
· Super High ịdị ọcha
· Ọdịiche dị n'ụdị mgbagwoju anya
Enwere ike iji ya n'okpuru ikuku Oxidizing
Ngwa:
Njirimara ahụkarị nke ihe eserese eserese:
Njupụta pụtara ìhè: | 1.85 g/cm3 |
Mgbochi ọkụ eletrik: | 11 μΩm |
Ike Flexural: | 49 MPa (500kgf/cm2) |
Ike ike mmiri: | 58 |
Ash: | <5ppm |
Nrụpụta okpomọkụ: | 116 W/mK (100 kcal/mhr-℃) |
Carbon na-enye ihe susceptorsna graphite components maka ihe niile na-eme ihe ike epitaxy dị ugbu a. Pọtụfoliyo anyị na-agụnye ihe mgbochi gbọmgbọm maka etinyere na nkeji LPE, pancake susceptors maka LPE, CSD, na Gemini nkeji, na otu-wafer susceptors maka etinyere na ASM nkeji. na-enye nhazi kachasị mma maka ngwa gị.