Ogologo ndụ SIC mkpuchi ihe eserese maka MOCVD K465i, Igwe ọkụ eserese maka epitaxy

Ihe mkpuchi eserese eserese SIC dị ogologo ndụ maka MOCVD K465i, Igwe ọkụ eserese maka onyonyo egosipụtara

Nkọwa dị mkpirikpi:

Ihe eserese kemịkalụ

Uru: Nnukwu nguzogide okpomọkụ

Ngwa: MOCVD/Ọkụ Vacuum/ Mpaghara Na-ekpo ọkụ

Nnukwu njupụta: 1.68-1.91g/cm3

Ike mgbanwe: 30-46Mpa

Nguzogide: 7-12μΩm

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Ogologo ndụIgwe ọkụ eserese eserese SICmaka MOCVD K465i, Igwe ọkụ eserese maka epitaxy,
graphite okpomọkụ, Igwe ọkụ eserese maka MOCVD, kpo oku, Igwe ọkụ eserese eserese SIC,

MOCVD Substrate Heater, Ihe Na-ekpo ọkụ Maka MOCVD

Graphitekpo oku:
Nkegraphite okpomọkụA na-eji ihe ndị dị n'ime ọkụ ọkụ dị elu na okpomọkụ ruru ogo 2200 na gburugburu oghere na 3000 degrees na deoxidized na ntinye gas gburugburu.
Isi atụmatụ nke graphitekpo oku:
1. uniformity nke kpo oku Ọdịdị.
2. ezigbo ọkụ eletrik na ibu eletrik dị elu.
3. nguzogide corrosion.
4. inoxidizability.
5. elu chemical ịdị ọcha.
6. ike n'ibu ike.
Ihe bara uru bụ ike ịrụ ọrụ nke ọma, uru dị elu na mmezi dị ala.
Anyị nwere ike ịmepụta mgbochi-oxidation na ogologo ndụ ogologo oge graphite crucible, graphite ebu na akụkụ niile nke ikpo ọkụ graphite.
Isi akụkụ nke ikpo ọkụ graphite:

Nkọwa nka nka	VET-M3
Njupụta buru ibu (g/cm3)	≥1.85
Ọdịnaya Ash (PPM)	≤500
Oke ike ike	≥45
Nguzogide akọwapụtara (μ.Ω.m)	≤12
Ike Flexural (Mpa)	≥40
Ike mkpakọ (Mpa)	≥70
Oke. Nha ọka (μm)	≤43
Ọnụọgụ nke Mgbasa ọkụ Mm/°C	≤4.4*10-6

Igwe ọkụ graphite maka ọkụ ọkụ eletrik nwere njirimara nke nguzogide okpomọkụ, nguzogide oxidation, ezigbo eletriki eletrik na ike nrụpụta ka mma. Anyị nwere ike igwe dị iche iche nke graphite kpo oku dị ka ndị ahịa si chepụta.