Ogologo ndụ SIC mkpuchi ihe eserese maka MOCVD K465i, Igwe ọkụ eserese maka epitaxy

Nkọwa dị mkpirikpi:

A na-eji ihe ndị na-ekpo ọkụ graphite na-ekpo ọkụ na ọkụ ọkụ dị elu na okpomọkụ ruru ogo 2200 na ebe oghere na 3000 degrees na deoxidized na ntinye gas gburugburu.
Isi atụmatụ nke ikpo ọkụ graphite:
1. uniformity nke kpo oku Ọdịdị.
2. ezigbo ọkụ eletrik na ibu eletrik dị elu.
3. nguzogide corrosion.
4. inoxidizability.
5. elu chemical ịdị ọcha.
6. ike n'ibu ike.
Ihe bara uru bụ ike ịrụ ọrụ nke ọma, uru dị elu na mmezi dị ala.
Anyị nwere ike ịmepụta mgbochi-oxidation na ogologo ndụ ogologo oge graphite crucible, graphite ebu na akụkụ niile nke ikpo ọkụ graphite.
Isi akụkụ nke ikpo ọkụ graphite:


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Mkpado ngwaahịa

Ogologo ndụ SICIgwe ọkụ eserese eserese maka MOCVD K465i, Graphite Heater maka epitaxy,
Igwe ọkụ eserese eserese maka MOCVD K465i, graphite okpomọkụ, Igwe ọkụ eserese maka MOCVD, Igwe ọkụ eserese eserese SIC,

Ogologo ndụIgwe ọkụ eserese eserese SICmaka MOCVD K465i

Nkegraphite okpomọkụA na-eji ihe ndị dị n'ime ọkụ ọkụ dị elu na okpomọkụ ruru ogo 2200 na gburugburu oghere na 3000 degrees na deoxidized na ntinye gas gburugburu.
Isi atụmatụ nkegraphite okpomọkụ:
1. uniformity nke kpo oku Ọdịdị.
2. ezigbo ọkụ eletrik na ibu eletrik dị elu.
3. nguzogide corrosion.
4. inoxidizability.
5. elu chemical ịdị ọcha.
6. ike n'ibu ike.
Ihe bara uru bụ ike ịrụ ọrụ nke ọma, uru dị elu na mmezi dị ala.
Anyị nwere ike ịmepụta mgbochi-oxidation na ogologo ndụ ogologo oge graphite crucible, graphite ebu na akụkụ niile nke ikpo ọkụ graphite.
Isi akụkụ nke ikpo ọkụ graphite:

Nkọwa nka nka

VET-M3

Njupụta buru ibu (g/cm3)

≥1.85

Ọdịnaya Ash (PPM)

≤500

Oke ike ike

≥45

Nguzogide akọwapụtara (μ.Ω.m)

≤12

Ike Flexural (Mpa)

≥40

Ike mkpakọ (Mpa)

≥70

Oke. Nha ọka (μm)

≤43

Ọnụọgụ nke Mgbasa ọkụ Mm/°C

≤4.4*10-6

 

Igwe ọkụ graphite maka ọkụ ọkụ eletrik nwere njirimara nke nguzogide okpomọkụ, nguzogide oxidation, ezigbo eletriki eletrik na ike nrụpụta ka mma. Anyị nwere ike igwe dị iche iche nke graphite kpo oku dị ka ndị ahịa si chepụta.

Ihe mkpuchi eserese eserese nke SIC dị ogologo maka MOCVD K465iIhe mkpuchi eserese eserese nke SIC dị ogologo maka MOCVD K465i


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