Mgbanaka eserese eserese nke CVD Silicon Carbide

Ihe oyiyi mgbanaka eserese nke CVD Silicon Carbide kpuchie

Nkọwa dị mkpirikpi:

VET Energy silicon carbide mkpuchi graphite mgbanaka bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Njirimara ahụkarị nke ihe eserese eserese:

Njupụta pụtara ìhè:	1.85 g/cm3
Mgbochi ọkụ eletrik:	11 μΩm
Ike Flexural:	49 MPa (500kgf/cm2)
Ike ike mmiri:	58
Ash:	<5ppm
Nrụpụta okpomọkụ:	116 W/mK (100 kcal/mhr-℃)

Anyị na-enye ihe susceptors dị iche iche na akụkụ graphite maka ndị nrụpụta epitaxy niile dị ugbu a. Ngwaahịa anyị gụnyere susceptors gbọmgbọm maka nkeji LPE, pancake susceptors maka LPE, CSD, na Gemini nkeji, yana otu-wafer susceptors maka etinyere na nkeji ASM.

Site na ijikọ mmekọrịta siri ike na OEM ndị na-eduga, nka nka na nka n'ichepụta, vet na-enye atụmatụ kachasị mma maka ngwa gị.

VET Energy bụ nkeezigbo onye na-emepụta ngwaahịa graphite na silicon carbide nwere mkpuchi CVD,nwere ike inyedị iche icheakụkụ ahaziri maka semiconductor na fotovoltaic ụlọ ọrụ. Our teknuzu otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọtamaka gị.

Fnri nke ngwaahịa anyị:

1. High okpomọkụ oxidation iguzogide ruo 1700℃.
2. Akwa ịdị ọcha nathermal uniformity
3. Magburu onwe corrosion eguzogide: acid, alkali, nnu na organic reagents.
4. Elu ike, kọmpat elu, ezigbo ahụ.
5. Ogologo ndụ ọrụ na ihe na-adịgide adịgide

CVD SiC薄膜基本物理性能 Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi
性质 / Ihe onwunwe	典型数值 / Uru a na-ahụkarị
晶体结构 / Crystal Structure	FCC β oge多晶，主要为（111) ndị a
密度 / Njupụta	3.21g/cm³
硬度 / Isi ike	2500 维氏硬度 (ibu 500g)
晶粒大小 / ọka SiZe	2 ~ 10μm
纯度 / Chemical ịdị ọcha	99.99995%
热容 / Okpomọkụ Ike	640 nk^-1· K^-1
升华温度 / Sublimation okpomọkụ	2700 ℃
抗弯强度 / Ike Flexural	415 MPa RT 4-isi
杨氏模量 Modul nke ntorobịa	430 Gpa 4pt ekwe, 1300 ℃
导热系数 / ThermalOmume omume	300W·m^-1· K^-1
热膨胀系数 / Mgbasa ọkụ (CTE)	4.5 × 10^-6K^-1