SiC txheej tuaj yeem npaj los ntawm cov tshuaj vapor deposition (CVD), precursor transformation, plasma spraying, thiab lwm yam. Cov txheej npaj los ntawm CHEMICAL vapor deposition yog uniform thiab compact, thiab muaj zoo designability. Kev siv methyl trichlosilane. (CHzSiCl3, MTS) ua silicon qhov chaw, SiC txheej npaj ...
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