Epitaxial Epi Graphite chim Susceptor

Epitaxial Epi Graphite chim Susceptor

Epitaxial Epi Graphite chim Susceptoryog ib qho tshwj xeeb tsim kev txhawb nqa thiab cov cuab yeej siv cua sov siv los tuav thiab kub semiconductor substrates thaum tsim cov txheej txheem xws li Deposition lossis Epitaxy txheej txheem.

Nws cov qauv muaj xws li feem ntau cylindrical los yog me ntsis chim-zoo li tus, nto nta ntau lub hnab los yog platforms rau tso lub wafers, yuav ua tau ruaj khov los yog hollow tsim, nyob ntawm seb cov cua kub txoj kev.

Lub luag haujlwm tseem ceeb ntawm epitaxial chim susceptor:

-Substrate kev them nyiaj yug: ruaj ntseg tuav ntau yam semiconductor wafers;
-Heat qhov chaw: muab qhov kub thiab txias uas yuav tsum tau rau kev loj hlob los ntawm cua sov;
-Temperature uniformity: xyuas kom cov cua sov tsis sib xws ntawm substrates;
-Rotation: feem ntau rotates thaum lub sij hawm loj hlob los txhim kho qhov kub thiab txias faib uniformity.

Ua hauj lwm hauv paus ntsiab lus ntawm Epi graphite chim susceptor:
- Nyob rau hauv lub epitaxial reactor, lub chim susceptor yog rhuab mus rau qhov yuav tsum tau kub (feem ntau 1000 ℃ -1200 ℃ rau silicon epitaxy);
-Lub thoob rotates los xyuas kom meej qhov kub thiab txias tis;
-Reaction gases decompose ntawm qhov kub thiab txias, tsim epitaxial txheej ntawm substrate nto.

Daim ntawv thov:
- Feem ntau siv rau silicon epitaxial kev loj hlob
-Tseem siv tau rau epitaxy ntawm lwm yam khoom siv semiconductor xws li GaAs, InP, thiab lwm yam.

VET Zog siv siab purity graphite nrog CVD-SiC txheej los txhim kho cov tshuaj stability:

Qhov zoo ntawm VET Zog Epitaxial Epi Graphite Barrel Susceptor:

- Kub kub stability;
- Zoo thermal uniformity;
-Yuav ua tau ntau yam substrates ib txhij, txhim kho ntau lawm efficiency;
-Chemically inert, tswj lub siab-purity loj hlob ib puag ncig.