Epitaxial Epi Graphite chim Susceptor
Epitaxial Epi Graphite chim Susceptoryog ib qho tshwj xeeb tsim kev txhawb nqa thiab cov cuab yeej siv cua sov siv los tuav thiab kub semiconductor substrates thaum tsim cov txheej txheem xws li Deposition lossis Epitaxy txheej txheem.
Nws cov qauv muaj xws li feem ntau cylindrical los yog me ntsis chim-zoo li tus, nto nta ntau lub hnab los yog platforms rau tso lub wafers, yuav ua tau ruaj khov los yog hollow tsim, nyob ntawm seb cov cua sov txoj kev.
Lub luag haujlwm tseem ceeb ntawm epitaxial chim susceptor:
-Substrate kev them nyiaj yug: ruaj ntseg tuav ntau yam semiconductor wafers;
-Heat qhov chaw: muab qhov kub thiab txias uas yuav tsum tau rau kev loj hlob los ntawm cua sov;
-Temperature uniformity: xyuas kom cov cua sov tsis sib xws ntawm substrates;
-Txoj kev sib hloov: feem ntau tig thaum lub sij hawm loj hlob los txhim kho qhov kub thiab txias sib npaug.
Ua hauj lwm hauv paus ntsiab lus ntawm Epi graphite chim susceptor:
- Nyob rau hauv lub epitaxial reactor, lub chim susceptor yog rhuab mus rau qhov yuav tsum tau kub (feem ntau 1000 ℃ -1200 ℃ rau silicon epitaxy);
-Lub thoob rotates los xyuas kom meej qhov kub thiab txias tis;
-Reaction gases decompose ntawm qhov kub thiab txias, tsim epitaxial txheej ntawm substrate nto.
Daim ntawv thov:
- Feem ntau siv rau silicon epitaxial kev loj hlob
-Tseem siv tau rau epitaxy ntawm lwm yam khoom siv semiconductor xws li GaAs, InP, thiab lwm yam.
VET Zog siv siab purity graphite nrog CVD-SiC txheej los txhim kho cov tshuaj stability:
Qhov zoo ntawm VET Zog Epitaxial Epi Graphite Barrel Susceptor:
- Kub kub stability;
- Zoo thermal uniformity;
-Yuav ua tau ntau yam substrates ib txhij, txhim kho ntau lawm efficiency;
-Chemically inert, tswj lub siab-purity loj hlob ib puag ncig.
Ningbo VET Energy Technology Co., Ltd yog lub tuam txhab high-tech tsom rau kev tsim khoom thiab muag cov khoom siv siab kawg, cov ntaub ntawv thiab thev naus laus zis suav nrog graphite, silicon carbide, ceramics, kev kho deg zoo li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam., cov khoom no yog dav siv nyob rau hauv photovoltaic, semiconductor, tshiab zog, metallurgy, thiab lwm yam ..
Peb pab pawg kws tshaj lij los ntawm cov tsev kawm tshawb fawb sab saum toj hauv tebchaws, thiab tau tsim ntau yam patented technologies los xyuas kom meej cov khoom ua tau zoo thiab zoo, kuj tuaj yeem muab cov neeg siv khoom nrog cov khoom siv kev daws teeb meem.
Peb zoo siab tos txais koj tuaj xyuas peb lub chaw kuaj thiab cog rau kev sib tham thiab kev koom tes!
