High Purity Graphite PECVD Boat for Solar Panel
Description
1). Adopted to eliminate the “color lenses ” technology , to make sure without “color lenses” during the long-term process.
2). Made of the SGL imported graphite material with high purity ,low impurity content and high strength.
3). Using the 99.9% ceramic for the ceramic assembly with strong corrosion resistant performance and brust proof.
4). Using the precision processing equipment to ensure the accuracy of each parts.
Specification
Item | Type | Number wafer carrier |
PECVD Graphite boat — The 156 series |
156-13 graphite boat | 144 |
156-19 graphite boat | 216 | |
156-21 graphite boat | 240 | |
156-23 graphite boat | 308 | |
PECVD Graphite boat — The 125 series |
125-15 graphite boat | 196 |
125-19 graphite boat | 252 | |
125-21 graphite boat | 280 |
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