High Purity Graphite PECVD Boat for Solar Panel

Short Description:

1). Adopted to eliminate the “color lenses ” technology , to make sure without “color lenses”  during the long-term process.
2). Made of the SGL imported graphite material with high purity ,low impurity content and high strength.
3). Using the 99.9% ceramic for the ceramic assembly with strong corrosion resistant performance and brust proof.
4). Using the precision processing equipment to ensure the accuracy of each parts.


Product Detail

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High Purity Graphite PECVD Boat for Solar Panel

 

Description 
1). Adopted to eliminate the “color lenses ” technology , to make sure without “color lenses”  during the long-term process.
2). Made of the SGL imported graphite material with high purity ,low impurity content and high strength.
3). Using the 99.9% ceramic for the ceramic assembly with strong corrosion resistant performance and brust proof.
4). Using the precision processing equipment to ensure the accuracy of each parts.

Specification

 Item        Type  Number wafer carrier
PECVD Graphite boat —
The 156 series
156-13 graphite boat 144
156-19 graphite boat 216
156-21 graphite boat 240
156-23 graphite boat 308
PECVD Graphite boat —
The 125 series
125-15 graphite boat 196
125-19 graphite boat 252
125-21 graphite boat  280

 

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