Vet-ChinaSilicon Carbide CeramicRufaffen rufin kariya ne mai girma da aka yi da wuyar gaske da juriyasilicon carbide (SiC)abu, wanda ke ba da kyakkyawan juriya na lalata sinadarai da kwanciyar hankali mai zafi. Waɗannan halayen suna da mahimmanci a samar da semiconductor, don hakaSilicon Carbide Ceramic CoatingAna amfani da ko'ina a cikin mahimman sassa na kayan masana'antar semiconductor.
Takamaiman rawar Vet-ChinaSilicon Carbide CeramicRufe a cikin samar da semiconductor shine kamar haka:
Haɓaka ƙarfin kayan aiki:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating yana ba da kyakkyawan kariya ta ƙasa don kayan masana'anta na semiconductor tare da tsananin ƙarfin sa da juriya. Musamman a cikin yanayin yanayin zafi mai zafi da lalatawa sosai, kamar haɓakar tururi na sinadarai (CVD) da etching na plasma, rufin zai iya hana saman kayan aikin yadda ya kamata daga lalacewa ta hanyar yazawar sinadarai ko lalacewa ta jiki, ta haka yana haɓaka rayuwar sabis. kayan aiki da rage raguwar lalacewa ta hanyar sauyawa da gyara akai-akai.
Inganta tsaftar tsari:A cikin tsarin masana'antar semiconductor, ƙananan gurɓatawa na iya haifar da lahani na samfur. Rashin rashin kuzarin sinadarai na Silicon Carbide Ceramic Coating yana ba shi damar tsayawa a cikin matsanancin yanayi, yana hana abu daga sakin barbashi ko ƙazanta, don haka tabbatar da tsabtar muhalli na tsari. Wannan yana da mahimmanci musamman ga matakan masana'anta waɗanda ke buƙatar daidaitattun daidaito da tsafta, kamar PECVD da ion implantation.
Haɓaka sarrafa zafi:A cikin babban zafin jiki na sarrafa semiconductor, kamar saurin sarrafa thermal (RTP) da tsarin iskar shaka, babban ƙarfin zafin jiki na Silicon Carbide Ceramic Coating yana ba da damar rarraba zazzabi iri ɗaya a cikin kayan aiki. Wannan yana taimakawa rage damuwa mai zafi da nakasar kayan abu da ke haifar da canjin zafin jiki, don haka inganta daidaiton masana'antar samfur da daidaito.
Taimakawa mahallin tsari mai rikitarwa:A cikin matakan da ke buƙatar sarrafa yanayi mai rikitarwa, irin su ICP etching da tsarin etching na PSS, kwanciyar hankali da juriya na oxyidation na Silicon Carbide Ceramic Coating suna tabbatar da cewa kayan aiki suna kula da kwanciyar hankali a cikin aiki na dogon lokaci, rage haɗarin lalata kayan aiki ko lalacewar kayan aiki saboda lalacewa. ga canjin yanayi.
CVD SiC薄膜基本物理性能 Asalin kaddarorin jiki na CVD SiCshafi | |
性质 / Dukiya | 典型数值 / Matsayi Na Musamman |
晶体结构 / Tsarin Crystal | FCC β lokaci多晶,主要为(111) 取向 |
密度 / Yawan yawa | 3.21g/cm³ |
硬度 / Tauri | 2500 维氏硬度 (500g kaya) |
晶粒大小 / Hatsi SiZe | 2 ~ 10 μm |
纯度 / Sinadaran Tsabta | 99.99995% |
热容 / Ƙarfin zafi | 640kg-1· K-1 |
升华温度 / Sublimation Zazzabi | 2700 ℃ |
抗弯强度 / Ƙarfin Flexural | 415 MPa RT 4-point |
杨氏模量 / Matasa Modul | 430 Gpa 4pt lankwasa, 1300 ℃ |
导热系数 / ThermalGudanarwa | 300 w·m-1· K-1 |
热膨胀系数 / Fadada thermal (CTE) | 4.5×10-6K-1 |
Barka da zuwa ziyarci masana'antar mu, bari mu kara tattaunawa!