silicon carbide yumbu rufi hita

Takaitaccen Bayani:

A matsayin ƙwararren ƙwararren Silicon Carbide Ceramic Coating masana'anta kuma mai siyarwa a China, Vet-China's Silicon Carbide Ceramic Coating ana amfani da shi sosai akan mahimman abubuwan kayan aikin masana'antar semiconductor, musamman lokacin da CVD da ayyukan PECVD suka shiga. Vet-China ya ƙware a masana'antu da samar da babban aikin Silicon Carbide Ceramic Coating, kuma ta himmatu wajen samar da fasahar ci gaba da samar da mafita ga masana'antar semiconductor. Maraba da tambayoyinku.


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Vet-ChinaSilicon Carbide CeramicRufaffen rufin kariya ne mai girma da aka yi da wuyar gaske da juriyasilicon carbide (SiC)abu, wanda ke ba da kyakkyawan juriya na lalata sinadarai da kwanciyar hankali mai zafi. Waɗannan halayen suna da mahimmanci a samar da semiconductor, don hakaSilicon Carbide Ceramic CoatingAna amfani da ko'ina a cikin mahimman sassa na kayan masana'antar semiconductor.

Takamaiman rawar Vet-ChinaSilicon Carbide CeramicRufe a cikin samar da semiconductor shine kamar haka:

Haɓaka ƙarfin kayan aiki:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating yana ba da kyakkyawan kariya ta ƙasa don kayan masana'anta na semiconductor tare da tsananin ƙarfin sa da juriya. Musamman a cikin yanayin yanayin zafi mai zafi da lalatawa sosai, kamar haɓakar tururi na sinadarai (CVD) da etching na plasma, rufin zai iya hana saman kayan aikin yadda ya kamata daga lalacewa ta hanyar yazawar sinadarai ko lalacewa ta jiki, ta haka yana haɓaka rayuwar sabis. kayan aiki da rage raguwar lalacewa ta hanyar sauyawa da gyara akai-akai.

Inganta tsaftar tsari:A cikin tsarin masana'antar semiconductor, ƙananan gurɓatawa na iya haifar da lahani na samfur. Rashin rashin kuzarin sinadarai na Silicon Carbide Ceramic Coating yana ba shi damar tsayawa a cikin matsanancin yanayi, yana hana abu daga sakin barbashi ko ƙazanta, don haka tabbatar da tsabtar muhalli na tsari. Wannan yana da mahimmanci musamman ga matakan masana'anta waɗanda ke buƙatar daidaitattun daidaito da tsafta, kamar PECVD da ion implantation.

Inganta kula da zafi:A cikin babban zafin jiki na sarrafa semiconductor, kamar saurin sarrafa thermal (RTP) da tsarin iskar shaka, babban ƙarfin zafin jiki na Silicon Carbide Ceramic Coating yana ba da damar rarraba zazzabi iri ɗaya a cikin kayan aiki. Wannan yana taimakawa rage damuwa mai zafi da nakasar kayan abu da ke haifar da canjin zafin jiki, don haka inganta daidaiton masana'antar samfur da daidaito.

Taimakawa mahallin tsari mai rikitarwa:A cikin matakan da ke buƙatar sarrafa yanayi mai rikitarwa, irin su ICP etching da tsarin etching na PSS, kwanciyar hankali da juriya na oxyidation na Silicon Carbide Ceramic Coating suna tabbatar da cewa kayan aiki suna kula da kwanciyar hankali a cikin aiki na dogon lokaci, rage haɗarin lalata kayan aiki ko lalacewar kayan aiki saboda lalacewa. zuwa canjin yanayi.

silicon carbide yumbu rufi
Hoton hoto (4)

CVD SiC薄膜基本物理性能

Asalin kaddarorin jiki na CVD SiCshafi

性质 / Dukiya

典型数值 / Yawan Daraja

晶体结构 / Tsarin Crystal

FCC β lokaci多晶,主要为(111) 取向

密度 / Yawan yawa

3.21g/cm³

硬度 / Tauri

2500 维氏硬度 (500g kaya)

晶粒大小 / Hatsi SiZe

2 ~ 10 μm

纯度 / Sinadaran Tsabta

99.99995%

热容 / Ƙarfin zafi

640kg-1· K-1

升华温度 / Sublimation Zazzabi

2700 ℃

抗弯强度 / Ƙarfin Flexural

415 MPa RT 4-point

杨氏模量 / Matasa Modul

430 Gpa 4pt lankwasa, 1300 ℃

导热系数 / ThermalGudanarwa

300 w·m-1· K-1

热膨胀系数 / Fadada thermal (CTE)

4.5×10-6K-1

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