RTP/RTA SiC Mai ɗaukar Rufi don Girman Epitaxial MOCVD

Takaitaccen Bayani:

VET Energy RTP/RTA SiC Coating Carrier samfuri ne mai girma da aka ƙera don samar da daidaito da ingantaccen aiki na tsawon lokaci. Yana da kyakkyawan juriya na zafi mai kyau da daidaituwa na thermal, babban tsabta, juriya na yashwa, yana mai da shi cikakkiyar bayani don aikace-aikacen sarrafa wafer.


  • Wurin Asalin:China
  • Tsarin Crystal:Farashin FCCβ
  • Yawan yawa:3.21 g/cm
  • Tauri:2500 Vickers
  • Girman hatsi:2 ~ 10 μm
  • Tsaftar Sinadari:99.99995%
  • Ƙarfin zafi:640J·kg-1·K-1
  • Zazzabi Sublimation:2700 ℃
  • Ƙarfin Felexural:415 Mpa (RT 4-Point)
  • Modul na Young:430 Gpa (4pt lankwasa, 1300 ℃)
  • Fadada thermal (CTE):4.5 10-6K-1
  • Ƙarfafa Ƙarfafawa:300 (W/MK)
  • Cikakken Bayani

    Tags samfurin

    SiC Coating Carrier Don RTP/RTA shine maɓalli mai mahimmanci da aka yi amfani da shi a cikin matakan masana'antu na semiconductor da ake kira Rapid Thermal Processing & Annealing, muna amfani da fasahar ƙwararrun mu don yin jigilar siliki tare da tsafta mai ƙarfi, ingantaccen suturar sutura da kyakkyawar rayuwar sabis, kamar yadda da high sinadaran juriya da thermal kwanciyar hankali Properties.

    Siffofin samfuranmu:

    1. High zafin jiki hadawan abu da iskar shaka juriya har zuwa 1700 ℃.
    2. Babban tsafta da daidaituwar thermal
    3. Excellent lalata juriya: acid, alkali, gishiri da kuma Organic reagents.

    4. Babban taurin, m surface, lafiya barbashi.
    5. Tsawon rayuwar sabis kuma mafi dorewa

    CVD SiC薄膜基本物理性能

    Asalin kaddarorin jiki na CVD SiCshafi

    性质 / Dukiya

    典型数值 / Yawan Daraja

    晶体结构 / Tsarin Crystal

    FCC β lokaci多晶,主要为(111) 取向

    密度 / Yawan yawa

    3.21g/cm³

    硬度 / Tauri

    2500 维氏硬度 (500g kaya)

    晶粒大小 / Hatsi SiZe

    2 ~ 10 μm

    纯度 / Sinadaran Tsabta

    99.99995%

    热容 / Ƙarfin zafi

    640kg-1· K-1

    升华温度 / Sublimation Zazzabi

    2700 ℃

    抗弯强度 / Ƙarfin Flexural

    415 MPa RT 4-point

    杨氏模量 / Matasa Modul

    430 Gpa 4pt lankwasa, 1300 ℃

    导热系数 / ThermalGudanarwa

    300 w·m-1· K-1

    热膨胀系数 / Fadada thermal (CTE)

    4.5×10-6K-1

    1

    2

    VET Energy shine ainihin masana'anta na samfuran graphite na musamman da samfuran silicon carbide tare da sutura daban-daban kamar suturar SiC, murfin TaC, murfin carbon gilashi, murfin carbon pyrolytic, da sauransu, na iya samar da sassa daban-daban na musamman don semiconductor da masana'antar hotovoltaic.

    Ƙungiyarmu ta fasaha ta fito ne daga manyan cibiyoyin bincike na gida, za su iya samar da ƙarin ƙwararrun kayan aiki don ku.

    Muna ci gaba da haɓaka matakai na ci gaba don samar da ƙarin kayan haɓaka, kuma mun yi aiki da fasaha ta keɓance mai ƙima, wanda zai iya sanya haɗin kai tsakanin shafi da abin da ke ƙasa ya fi ƙarfin kuma ba shi da haɗari ga ɓarna.

    Barka da zuwa ziyarci masana'antar mu, bari mu kara tattaunawa!

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