Silicon Carbide Mai Rufin Graphite Susceptor don Etching LED

Takaitaccen Bayani:

Silicon carbide susceptor don LED etching (SiC tray) na'ura ce ta musamman don etching silicon mai zurfi ( inji ICP etching). mai ɗaukar wafer, wanda kuma aka sani da mai ɗaukar wafer, mai ɗaukar wafer silicon, wanda kuma aka sani da wafer aljihu. An yi amfani da shi sosai a cikin semiconductor CVD da vacuum sputtering.


Cikakken Bayani

Tags samfurin

Silicon carbide rufaffiyar susceptor nea keybangaren da aka yi amfani da shi a cikin matakai daban-daban na masana'antu na semiconductor.Muna amfani da fasahar mu don yin abin rufe fuska na silicon carbide datsarki sosai,mai kyaushafidaidaitoda kyakkyawar rayuwar sabis, har dahigh sinadaran juriya da thermal kwanciyar hankali Properties.

Kudin hannun jari VET Energy daainihin manufacturer na musamman graphite da silicon carbide kayayyakin tare da CVD shafi,iya bayarwadaban-dabansassa na musamman don semiconductor da masana'antar hotovoltaic. OƘungiyar fasaha ta ur ta fito ne daga manyan cibiyoyin bincike na gida, za su iya samar da ƙarin ƙwararrun kayan aikina ka.

Muna ci gaba da haɓaka matakai na ci gaba don samar da ƙarin kayan haɓaka,kumasun yi aiki da keɓantaccen fasaha mai ƙima, wanda zai iya sa haɗin kai tsakanin sutura da abin da ke ƙasa ya fi ƙarfi kuma ƙasa da ƙasa don cirewa.

FAbincin samfuranmu:

1. High zafin jiki oxidation juriya har zuwa 1700.
2. Tsafta mai girma dathermal uniformity
3. Excellent lalata juriya: acid, alkali, gishiri da kuma Organic reagents.
4. Babban taurin, m surface, lafiya barbashi.
5. Tsawon rayuwar sabis kuma mafi dorewa

CVD SiC薄膜基本物理性能

Asalin kaddarorin jiki na CVD SiCshafi

性质 / Dukiya

典型数值 / Matsayi Na Musamman

晶体结构 / Tsarin Crystal

FCC β lokaci多晶,主要为(111) 取向

密度 / Yawan yawa

3.21g/cm³

硬度 / Tauri

2500 维氏硬度 (500g kaya)

晶粒大小 / Hatsi SiZe

2 ~ 10 μm

纯度 / Sinadaran Tsabta

99.99995%

热容 / Ƙarfin zafi

640kg-1· K-1

升华温度 / Sublimation Zazzabi

2700 ℃

抗弯强度 / Ƙarfin Flexural

415 MPa RT 4-point

杨氏模量 / Matasa Modul

430 Gpa 4pt lankwasa, 1300 ℃

导热系数 / ThermalGudanarwa

300 w·m-1· K-1

热膨胀系数 / Fadada thermal (CTE)

4.5×10-6K-1

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