VET EnergyPECVD tsarin graphite mai ɗaukar hoto babban inganci ne wanda aka keɓance shi don tsari na PECVD (ingantacciyar sinadari mai tururi). Wannan graphite m da aka yi da high-tsarki, high-yawa graphite abu, tare da m high zafin jiki juriya, lalata juriya, girma da kwanciyar hankali da sauran halaye, na iya samar da barga m dandamali ga PECVD tsari, don tabbatar da uniformity da flatness na bakin ciki fim. ajiya.
Masu ɗaukar hoto don tsarin PECVD suna da halaye masu zuwa:
▪ Tsabta mai girma: ƙarancin ƙazantaccen abun ciki, guje wa gurɓatar fim da tabbatar da ingancin fim.
▪ Babban yawa: babban yawa, ƙarfin injina mai ƙarfi, mai iya jure yanayin zafi da matsanancin yanayin PECVD.
▪ Kyakkyawan kwanciyar hankali: ƙaramin canji a babban zafin jiki, tabbatar da kwanciyar hankali.
▪ Kyakkyawan yanayin zafi: yadda ya kamata canja wurin zafi don hana zafi mai zafi.
Ƙarfin juriya mai ƙarfi: mai iya jurewa zaizayar iskar gas iri-iri da plasma.
▪ Sabis na musamman: masu ɗaukar hoto masu girma da siffofi daban-daban za a iya keɓance su bisa ga bukatun abokin ciniki.
Abubuwan graphite daga SGL:
Na yau da kullun: R6510 | |||
Fihirisa | Gwaji misali | Daraja | Naúrar |
Matsakaicin girman hatsi | ISO 13320 | 10 | μm |
Yawan yawa | DIN IEC 60413/204 | 1.83 | g/cm3 |
Bude porosity | Farashin 66133 | 10 | % |
Girman pore matsakaici | Farashin 66133 | 1.8 | μm |
Lalacewa | Farashin 51935 | 0.06 | cm²/s |
Rockwell taurin HR5/100 | DIN IEC60413/303 | 90 | HR |
Takamaiman tsayayyar wutar lantarki | DIN IEC 60413/402 | 13 | μΩm |
Ƙarfin sassauƙa | DIN IEC 60413/501 | 60 | MPa |
Ƙarfin matsi | Farashin 51910 | 130 | MPa |
Modules na matasa | Farashin 51915 | 11.5×10³ | MPa |
Thermal fadada (20-200 ℃) | Farashin 51909 | 4.2X10-6 | K-1 |
Thermal conductivity (20 ℃) | Farashin 51908 | 105 | Wm-1K-1 |
An ƙirƙira shi musamman don ƙirar ƙirar hasken rana mai inganci, yana tallafawa sarrafa wafer mai girma G12. Ingantacciyar ƙira mai ɗaukar kaya yana ƙaruwa sosai da fitarwa, yana ba da damar ƙimar yawan amfanin ƙasa da ƙananan farashin samarwa.
Abu | Nau'in | Mai ɗaukar waya mai lamba |
Jirgin ruwan PEVCD Grephite - Jerin 156 | 156-13 grephite jirgin ruwa | 144 |
156-19 grephite jirgin ruwa | 216 | |
156-21 grephite jirgin ruwa | 240 | |
156-23 graphite jirgin ruwa | 308 | |
Jirgin ruwan PEVCD Grephite - Jerin 125 | 125-15 grephite jirgin ruwa | 196 |
125-19 grephite jirgin ruwa | 252 | |
125-21 jirgin ruwan graphite | 280 |